How Quick Dump Rinsers Improve Wet Processing Results

While effective and rapid rinsing with a low particle count remains a key benefit of quick dump rinsers, reduced water usage is also becoming more important. Special design measures can lower the amount of water required to rinse the silicon wafers while retaining fast and efficient operation with a low level of particle contamination.

Low water consumption is especially important in some regions such as the Western U.S., where a long-term drought makes water conservation mandatory. Even in other areas, a reduced use of the deionized water used in silicon wafer fabrication saves money and is environmentally responsible. Modutek has pioneered the design of quick dump rinsers that feature efficient use of deionized water, fast operation, and low particle entrapment.

Quick Dump Rinser Benefits that Incorporate Reduced Water Usage

Modutek’s quick dump rinsers feature a state-of-the-art design for efficient operation while minimizing rinse time, reducing the particle count, and keeping deionized water usage to a minimum. Modutek’s quick dump rinsers offer the following characteristics:

  • Efficient Rinsing. The units have dual spray manifolds and low misting nozzles for quick and complete rinsing away of chemical residues.
  • Nitrogen Bubbler. The bubbler generates nitrogen bubbles as the tank fills, removing additional contaminants and particles.
  • 360 Degree Overflow Weir. As the dislodged impurities rise to the surface, they are flushed away across the overflow weir and out of the tank.
  • Programmable Water Use. Modutek’s quick dump rinsers can be programmed to use less water.
  • Contoured Bottom. The rinser bottom is contoured around a wafer cassette, reducing the amount of water required.
  • Large Machined Trap Door. The machined trap door doesn’t need gaskets or seals that could trap particles, and the large size lets water drain rapidly.
  • Polypropylene Construction. High-quality smooth polypropylene construction ensures that the tank is not a source of contamination with new particles.
  • Automatic Dump and Refill. The rinsing controller can be set to automatically dump and refill every two hours, reducing bacterial growth and minimizing the possibility of contamination.
  • Optional Reclaim System. An optional reclaim system further reduces water consumption and lowers costs.
  • Variety of Standard Sizes. Modutek offers seven standard tank sizes for their quick dump rinsers, and can accommodate many special customer needs.

Modutek has designed the quick dump rinser to operate as a stand-alone unit or for integration into a silicon wet etching process line. The rinser can improve the overall performance of the line and lower costs while reducing the number of defective products.

Benefits of Using Modutek’s Quick Dump Rinser

Modutek’s design is based on extensive experience working with wet process equipment to address key customer concerns. Benefits include the following:

  • The reduced water consumption due to rapid rinsing and a water-conserving design lowers costs and reduces the environmental impact.
  • The machined trap door and laminar flow of rinsing water reduce the particle count and improve output quality.
  • The smooth polypropylene construction avoids additional contamination and reduces the percentage of rejects.
  • Quick rinsing allows increased throughput for the production line and reduces costs.

From its close working relationship with customers, Modutek can address the challenges manufacturers often have with meeting higher product densities, smaller silicon structures, and increasing regulation with using chemicals and water. Modutek continuously works to improve silicon wafer processing capabilities, while keeping in mind the overall costs of ownership and efficient wafer processing.

Modutek Provides Innovative Solutions to Meet Customer Needs

Modutek’s quick dump rinsers represent years of innovative design and development. These systems let semiconductor manufacturers and research facilities reduce water consumption while increasing output and reducing the number of product defects. Overall facility performance is improved through cost reduction and improved output quality. Contact Modutek for a free quote or consultation to discuss your specific processing requirements at 866-803-1533 or email modutek@modutek.com.

How to Select an Acid Neutralization System to Reduce Chemical Disposal

When industrial processes such as semiconductor manufacturing use chemicals, the chemical waste needs to be treated before disposal. Chemical waste treatment can be handled on-site with an acid neutralization system or companies can use outside service providers to pick up the waste and properly dispose of it.

Modutek’s acid neutralization systems are designed for easy and flexible installation along with reliable operation and low chemical consumption. The systems make it easy for customers to avoid the costs of hiring disposal companies by treating chemical waste in-house. For many industrial processes, the chemical waste treated with an acid neutralization system is safe enough to drain into the local sewer system.

Continuous Flow Versus Batch Neutralization Systems

For most large industrial operations, a continuous flow acid neutralization system is the best solution. The waste chemicals from a process are produced continuously and they are automatically treated. A continuous flow of 5 to 100 gallons per minute (GPM) can be neutralized. Smaller industrial facilities often operate in batch mode where small quantities of used chemicals need to be disposed of. Modutek’s acid neutralization systems treat and neutralize chemicals using the continuous flow method.

Flexible Installation Means Modutek Systems Are Suited for Many Different Applications

To reduce chemical disposal via an outside service provider, an in-house neutralization system has to be flexible and easy to install. Cost-effective systems have to feature low chemical consumption for complete neutralization allowing disposal into a local sewer. Modutek’s acid neutralization systems satisfy these requirements and can save customers money by reducing chemical disposal costs.

Additional installation features for various service applications include the following:

  • Indoor or outdoor installation
  • Working volume up 4000 gallons
  • 110% Secondary containment tank for extra safety
  • Final discharge sample tank with pH probe and chart recorder for compliance purposes
  • Acidic or alkaline chemical waste treatment in two or three stages
  • Fully automatic operation with a touch screen monitor
  • Unitized construction with larger systems skid-mounted
  • Microprocessor-based pH controls with a comprehensive alarm system

Modutek’s acid neutralization systems are designed to fit into existing process lines with just a plumbing connection and electrical hookup. Once installed, the systems offer problem-free chemical waste neutralization and disposal.

Sensors, Meters, and Automation Help with Ease of Operation

Modutek acid neutralization systems are designed to work reliably in fully automated mode while sensing chemical waste composition and triggering alarms when key variables show abnormal values. Electronic chemical metering pumps supply the correct amounts of neutralizing chemicals while Signet pH probes and transmitters monitor the composition of the chemical waste. Signet paddle wheel flow sensors and signet 9900 flow meters/totalizers send their signals back to a PLC that controls alarms. The systems are designed to work independently while providing readouts for operators tracking the process. Chemical use, discharge pH, overall flow, and triggered alarms are recorded. Operators can make sure that discharged waste stays within the environmental regulatory framework and can use the recorded data to demonstrate compliance with proscribed values.

Modutek’s Expertise in Chemical Processing and Neutralization

By working closely with customers and industry partners, Modutek provides continuous innovative products to meet customer needs. Modutek has its own in-house expertise to evaluate specific applications and make recommendations. After identifying process requirements, Modutek can make suggestions and offer systems from its complete line of chemical handling equipment. For a free quote or consultation to discuss your chemical processing and neutralization requirements contact Modutek at 866-803-1533 or email modutek@modutek.com.