Why Acid Fume Scrubbers are Required for a Safe Work Environment

Why Acid Fume Scrubbers are Required for a Safe Work Environment When wet bench processes use acids to clean, strip, and etch silicon wafers, their exhaust air contains acid mist. This air can’t be released into the workspace because it can harm employees and corrode equipment. Acid fume scrubbers remove acid mist from the exhaust air. They neutralize the acid exhaust and deliver clean air that is safe to release into the outside environment. Modutek’s acid fume scrubbers can remove up to 99 percent of acid mist and are easy to operate. They are available in a wide range of capacities and can be integrated into the wet bench processing line.

Acid Fume Scrubbers Work by Neutralizing Acid Exhaust

Acid fume scrubbers pass the acid mist over a bed containing neutralizing chemicals. The chemicals absorb the acids in the exhaust, and the resulting chemical reaction changes the acid into a harmless solution. The air from the acid fume scrubber is clean, and the neutralized discharge liquid can be recycled. The operation of the acid fume scrubbers is reliable and safe.

To maximize the absorption of acid mist by the neutralizing chemicals, Modutek uses a high-surface packing material. Supplied by industry leader Lantec, the packing material is kept wet with a neutralizing solution. Because of the many protuberances and crevices in the packing material, more acid mist can be absorbed as they pass over the packed scrubber bed.

The high efficiency of Modutek’s scrubbers has to be matched with the proper flow of exhaust air. Modutek offers scrubbers with flow capacities from 500 to 25,000 CFM. This wide range of capacities is suitable for fabrication lines from the smallest research lab facility to large manufacturing plants. In addition to cleaning acids from the exhaust air of wet process stations, Modutek’s acid fume scrubbers can be used with other chemical handling equipment. Any process that produces an acid exhaust can benefit from using Modutek’s acid fume scrubbers.

Almost all acids are removed when the exhaust from the wet process station matches the scrubber’s flow capacity. Modutek can incorporate acid fume scrubbers within their wet bench stations to provide an integrated solution. Acid fume scrubbers provide a simple, low-cost way to neutralize acid exhausts from chemical processes.

Advantages and Benefits of Modutek’s Acid Fume Scrubbers

Modutek’s acid fume scrubbers are designed to provide customers with ease of use and low operating costs. The operator interface is intuitive and gives operators all the information they need with regard to pressures, flow, liquid levels, and discharge. Water use is low, and maintenance is designed to be easy and quick. There is a bottom drain, and the scrubbers have a double containment system to avoid leaks and reduce spills. Custom-built acid fume scrubbers are available to meet most acid exhaust neutralization requirements.

Design and construction deliver the following benefits:

  • Operators can quickly learn to use the simple interface and meet clean air targets
  • High air cleaning efficiency improves workplace safety
  • The wide range of capacities means almost any facility with acid mist exhausts can find a suitable scrubber model
  • Low operating costs and low total cost of ownership make Modutek’s acid fume scrubber an attractive choice

Modutek Provides Reliable Wet Bench and Chemical Handling Equipment

As a leader in wet bench technology and chemical handling equipment, Modutek helps support customers with their semiconductor manufacturing needs. In addition to acid fume scrubbers, Modutek offers a complete line of wet bench stations and equipment and can advise on new additions and upgrades to existing systems. Whether it’s a stand-alone acid fume scrubber, an integrated wet process station, or a complete production line, Modutek can provide reliable equipment to meet your requirements. Contact us for a free quote or consultation to discuss your specific requirements.

How Quartz Tanks Provide High Reliability and Safety for Wafer Processing

How Quartz Tanks Provide High Reliability and Safety for Wafer ProcessingBecause quartz is an inert substance that does not take part in acid chemical reactions, quartz tanks are ideal containers for silicon wafer processing. The flame-polished quartz used in Modutek’s quartz tanks is impervious to the powerful acids used for processes such as SC1, SPM, and the Piranha process. Quartz tanks are designed to minimize particle contamination and to accurately control the temperature when required. As a result, quartz tanks deliver superior results for wet bench semiconductor fabrication.

Quartz Tanks Reliably Reduce Particle Counts

As semiconductor products require tighter packing of components, a reduced particle count becomes more important. The size of the microscopic structures etched into silicon wafers is reduced to such an extent that a single particle can distort the required shape. The resulting semiconductor chips can be defective or have reduced quality. Sometimes the performance could be better, or the lifespan is reduced. A low particle count is critical for achieving excellent quality output and a high yield from the semiconductor fabrication line.

Modutek’s quartz tanks reduce particle contamination to improve process results. The high-purity flame-polished quartz used in Modutek’s quartz tanks makes it chemically inert to most chemical compounds, including acids, water, and salt. Since the quartz crystal does not react with the chemicals used in semiconductor fabrication, contamination from the quartz tanks is eliminated.

The quartz tank design reduces particle contamination as well. Modutek’s quartz tanks are based on over 30 years of tank design experience to minimize particle contamination. The seamless design and sloped housing construction eliminate places where particles could become lodged. Actual results from real-world fabrication confirm that Modutek’s quartz tanks deliver low particle counts.

Accurate Quartz Tank Temperature Controls Produce Precise Results

For many wet bench processes, the etch rate depends on how the process is set up. The temperature, concentration, silicon wafer crystal lattice orientation, and possible doping of the silicon wafers all influence the etch rate. Except for the process temperature, they are all determined at the start of the process. The temperature, on the other hand, varies. It rises quickly at the beginning and can change as the etching progresses. Precise temperature control is required for reliable etching results.

The etch rate is critical for determining the shapes and details of the microscopic structures etched into the silicon wafer. If etching does not proceed at the right speed, the etched shapes may be too large or too small. The resulting semiconductor products won’t have the expected characteristics and may have to be discarded.

Modutek’s quartz tanks feature a rapid temperature rise to the temperature set point and precise control. The temperature can be set at up to 180 degrees Centigrade. The temperature rises at up to 2 degrees C per minute and is controlled with a precision of plus/minus 1 degree C. The rapid temperature rise helps achieve high throughput, and the tight temperature control provides excellent repeatability.

Quartz Tank Design Influences Output Quality

The quality of silicon wet etching results depends on low particle counts and accurate control of the process temperature. Modutek’s quartz tanks are designed with these two factors in mind. The tanks support wet bench processes such as SC1 and SPM and deliver consistent etching results. Reduced particle counts and excellent etch rate control are consistent during continuous manufacturing and across different batches.

Modutek Provides Safe and Reliable Equipment

Modutek works closely with customers to improve their wet processing manufacturing results, resolve problems and find solutions. Quartz tanks and other equipment that Modutek provides deliver high reliability and safe operation to support various wet processes. Contact us for a free quote and consultation to discuss your specific requirements.