Category Archives: Wafer Fabrication Equipment

How Automated Controls Improve Silicon Wafer Manufacturing

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How Automated Controls Improve Silicon Wafer ManufacturingPrecise automated controls that are incorporated into wafer manufacturing equipment help manufacturers meet the challenges of higher component densities and compliance with environmental regulations. They provide excellent repeatability and accurate chemical dosages that precisely control the etch rate and the cleaning and stripping processes. Chemical neutralization and disposal are handled automatically with document generation to prove regulatory compliance.

In addition to delivering improved process control, the automation software can easily be customized for specialized process requirements or updated to reflect process changes. From the user inputs through to process equipment, the different components of automated wafer fabrication equipment work together to improve manufacturing outcomes.

An Intuitive User Interface Helps Operators Control the Process

A good user interface shows critical process variables and the status of necessary equipment. Operators can see how the process progresses and intervene to activate or shut down components if necessary. The interface can easily be updated when process requirements change or equipment is added. For fully automated stations, the process runs by itself after the operators select the sequence and set the initial conditions via the user interface.

Modutek automated stations use a touch screen with a graphical user interface (GUI). Operators see visual representations of the process and can control equipment from the screen. Because Modutek designs and programs the underlying software in-house, the company can easily change and update the GUI.

Automated Controllers Translate GUI Commands to Equipment Operation

Automation controls timed command sequences or keep process variables at the required set points. Sequences are programmed with Programmable Logic Controllers (PLCs) that output a sequence of commands when the operator issues the initial input. PLCs are programmed as a chain of outputs triggered by elapsed time or automated inputs. The chains are easy to program and change if needed.

Automation of process variables includes controllers for temperature, pressure, flow, or level. Modutek can integrate third-party controllers such as Omron or Allen Bradley for higher-level automation, such as machine control or special functions. This capability also allows Modutek to integrate its equipment into existing installations.

Data Logging Helps to Evaluate System Performance

When the Modutek automated stations are programmed to output key variables, the data can be assembled into reports helpful in evaluating performance and monitoring the program logic controls. The data can be collected over Ethernet and viewed remotely. Automated logs can be used to check values such as chemical use, output quantities, output yields, and chemical disposal details. Feedback from data logging is key to the optimization of the overall process.

Optional Equipment Interfaces Increase Application Flexibility

Modutek’s automated wafer fabrication equipment uses an optional interface that allows it to work with existing systems and components from other manufacturers. The SEMI Equipment Communications Standard/Generic Equipment Model (SECS/GEM) developed by the Semiconductor Equipment and Materials International (SEMI) organization governs the interaction of the software running the automated controllers and the semiconductor manufacturing equipment. Under the SECS/GEM standard, Modutek can customize its systems to meet customer requirements for updating its process lines or adding new equipment.

As a leading semiconductor equipment manufacturer, Modutek continuously innovates on equipment and automation. The company can supply individual pieces of equipment or provide turnkey installations. Modutek ensures its equipment meets customer needs and performs as expected in both cases.

How Automated Wafer Fabrication Equipment Optimizes Process Control

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Fully or semi-automated silicon wafer fabrication equipment can reduce errors and improve repeatability in wafer processing while at the same time increasing flexibility. Automatic controls let operators change process parameters if required for different processes or for process optimization.

Once a process runs in an optimized fashion, automated controls allow operators to make sure that the process continues to run the same way, either in a continuous mode or in batch processing. Automatic controls can ensure that an error-free process increases productivity, improves output quality, and reduces waste.

Automatic Controls Increase Operating Flexibility

Automatic controls use programmable software to specify how process steps operate and their sequence. The software determines the timing, chemical dosages, wafer transfers between stations, waste chemical neutralization, and chemical disposal. Once operators have programmed a process, they can carry out test runs and find where settings could be changed to improve the process results.

This means a process can be adapted to reflect changing requirements or can be changed so it produces better outcomes. At the same time, the process software in both semi-automated and fully automatic stations controls robotics that handles the wafers and reduce particle contamination. Automatic controls with the associated robotics can save money and produce semiconductor products with fewer defects and closer adherence to specifications.

Automated Operation with Robotics Contributes to Optimized Operations

Robotics handle and transfer the silicon wafers are a key part of the automated semiconductor manufacturing operations. For fully automated lines, multiple robots will hand the wafers down the process line. The robots have to operate to an extremely high level of precision to avoid damaging the delicate wafers and to place them precisely in the right locations. With the right robotics, properly programmed and fully automated, a semiconductor processing line can increase throughput and perform reliably to meet delivery times and volumes. Optimized process control combined with robotic speed and reliability can reduce costs and improve semiconductor fabrication facility performance.

For semi-automatic wafer fabrication equipment, the robotics generally handle less processing, however, Modutek has developed a new rotary rotation robot that can handle more process steps. The use of the rotary rotation robot can reduce the overall length and footprint size of a conventional station in a space-saving design. This allows manufacturing facilities and research labs with limited space to install semi-automatic fabrication lines using smaller stations with new robotics. As is the case for fully automated stations, semi-automatic controls and robotics can deliver increased speed, higher reliability, and improved facility performance.

Selecting the Right Automation Solution

Whether it is a fully automated process line or semi-automatic wafer processing equipment, automation can improve chemical handling and the cleaning and etching of silicon wafers. Software control ensures that chemical mixtures are correct, the timing of process steps is accurate and wafers are moved and transferred with a minimum of particle contamination. This allows wafer fabrication processes to be accurately completed with optimum efficiency and generates fewer defective components.

With more accurate process control, etch rates and yields can be higher and comprehensive tracking of variables delivers a complete picture of the process. Once the automated process has run for a large number of jobs, a saved software library gives manufacturers the ability to reuse previous configurations and the flexibility to make specific changes in the previous process runs.

Modutek Provides In-house Expertise and Support

With over 40 years of experience in wet bench technology and extensive in-house expertise in manufacturing operations, Modutek can help customers choose the right level of automation for their semiconductor fabrication line. Modutek offers free consultations and can discuss how different levels of automation and robotics usage can impact fabrication line performance. In general, the right level of automation for a semiconductor fabrication facility is one that improves process control and optimization and delivers long-term cost savings while improving output. Contact Modutek for a free consultation to discuss the details of your manufacturing equipment requirements.

How Process Controls Are Improved with Automated Wet Bench Equipment

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how-process-controls-are-improved-with-automated-wet-bench-equipmentWhen semiconductor manufacturing is automated, tight process control can improve overall facility performance. An optimized manufacturing process can reduce consumption of consumables and production results are more uniform. Once a batch has run successfully, an automated process ensures that it will run the same way for subsequent batches. With good design, automation reduces silicon wafer handling and particle contamination. A wet process equipment provider has to be able to customize the automated functions to meet the needs of the application, but once it is set up, the process can run with a minimum of amount of monitoring from an operator.

Automation Can Reduce Chemical Use

An optimized automated process uses the least amount of chemicals required to carry out the etching or cleaning function and it continues to do so reliably. Spills and human error are eliminated while chemical use is tracked. Chemical treatment prior to disposal is closely monitored and neutralizing chemical use is reduced to a minimum while still ensuring compliance with environmental regulations. When overall chemical use is reduced, the cost savings can be substantial.

Output Quality is Improved with Automation

As semiconductor components and micro-structures become more tightly packed, they are more sensitive to dosage variations and process parameter inaccuracies. Processes such as etching are often dependent on temperature and chemical concentration. The timing of the process steps is critical in obtaining exactly the required etched pattern. Fully automated wafer fabrication equipment has these variables programmed in and runs the process accurately and the same way each time. Semiconductor component output is consistent with fewer defects and rejections.

Automated Neutralization Reduces Environmental Impact

Using an automated system to treat, neutralize and discharge chemical waste has several advantages. Waste from wet process manufacturing can be toxic and hazardous so human error during neutralization can have severe consequences for the environment and surrounding communities. Automation can ensure that acid and solvent chemical waste is neutralized and an automated system can block discharge if the output pH is not within predefined limits. Because all chemical use and discharge is tracked, compliance with environmental regulations can easily be demonstrated.

An Experienced Provider Can Customize Both Equipment and Automation

Depending on what kind of semiconductor components are being produced, a manufacturing or research facility may require highly customized equipment to carry out the process steps required. The automation has to flexible enough to accommodate custom process steps and the equipment provider has to be able to program the automation accordingly. Ideally, an experienced provider will work with customers to exactly define what is needed and then build the wafer fabrication equipment with the required automation. Such cooperation can result in equipment and controls designed and built for the specific purpose and delivering exceptional performance for the customer.

Modutek Designs and Builds Its Own Equipment with Automation

Modutek designs and builds its own equipment in-house based on extensive experience in wet process technology. This leaves Modutek in an ideal position to customize wafer processing equipment as needed to meet customer requirements. Because the expertise is in-house, Modutek engineers and technicians can adjust designs to reflect customer needs. This ability extends to the wet bench stations as well as to the automation that runs them.

Modutek’s SolidWorks Simulation software calculates precise dosages and process parameters and is also developed and supported in-house. Modutek can offer assistance for custom design of process stations, supporting equipment, and software to ensure customers get the systems they need. After the process line is built, installed, and tested, Modutek can provide full support with their own in-house specialists to make sure the automated semiconductor manufacturing process continues to operate as expected.

Improving Wafer Manufacturing Processes with Automated Equipment

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Improving Wafer Manufacturing Processes with Automated EquipmentAutomated wafer fabrication equipment can improve semiconductor manufacturing facility performance, but all the associated process settings must be programmed properly. Before the manufacturing process can be implemented on a fully automated wet bench station, the settings, timing and other parameters have to be fine tuned. As circuit geometries and micro-structures become smaller and more tightly packed, the chemical concentrations, temperature levels and timed intervals affecting the etch rate become more and more critical. Fully automated equipment can precisely and reliably run a semiconductor manufacturing process once the correct variables are determined and programmed.

Manual Operation Can Determine the Settings for the Process Variables

Once wafer fabrication processes such as KOH etching are chosen, the process variables can be selected. Etching can be either isotropic or anisotropic and etching speed or precision can vary. Other factors may come into play as well. Initially it makes sense to run the new process on a manual station so that the process results for rough settings of basic variables such a concentrations, temperature and timing can be determined. These variables can then be adjusted to get an initial and acceptable process result.

Semi-Automatic Operation Can Fine Tune the Process

After determining the rough settings of the basic variables in manual operation, transferring to semi-automatic operation to optimize the process steps can save time. Those variables that will no longer change can be programmed into the semi-automatic software control while the others can be adjusted manually to get the best process result. In this way, as each process step is optimized, it can be programmed so that when optimization is complete, the process is ready to run on fully automated wafer processing equipment.

Fully Automated Operation Improves Semiconductor Manufacturing Facility Performance

Fully automated wet process stations for which the process has been optimized in manual and semi-automated operation can help improve overall production facility performance in the following ways:

  • Programmed settings ensure that the process is repeatable for different batches
  • Use of wet processing simulation software during optimization helps ensure accurate process parameters
  • Full automation eliminates human error
  • Precise dosages of chemicals and accurate timing results in fewer defective products
  • Throughput and wafer yields are increased

The programmed settings can be used again to get an identical result and they can be used for similar applications with minor adjustments. Instead of relying on operators to prepare etching baths, the fully automated station mixes the required chemicals quickly, safely and reliably, always the same way and without waste or spillage. The result is precise control over the process steps, fast execution without delays and high output quality.

Improved Output Relies on Optimized Software and Fully Automated Stations

Using an optimization strategy with manual and semi-automatic operation and running the optimized process on fully automated wafer fabrication equipment can lead to continuous improvement in semiconductor manufacturing operations. As new processes are brought online and optimized, they replace older versions that may not use chemicals as efficiently, may rely on some manual input or may not have the same precise and reliable execution as the fully automated stations. Tailor-made software working with fully automated wet process equipment can result in such continuous improvements.

With 40 years of experience in wet process technology and extensive in house expertise from manufacturing its own equipment, Modutek is ideally situated to supply fully automated equipment that improves semiconductor manufacturing output. The company has a complete line of standard and custom-built wet process equipment and the SolidWorks software used to calculate process parameters is programmed in house. Working closely with its customers, Modutek designs and builds its fully automated stations and programs the corresponding software to help them meet their goals for continuous improvement. Contact Modutek for a free quote or consultation on selecting equipment that supports your specific manufacturing process requirements.

How Software Controls Support Unique Wet Processing Requirements

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Automated software control systems can help improve wet bench operations but the software has to be flexible to meet the unique needs of a wet processing application. Software controls increase dosage accuracy, timing reliability and process safety but process parameters or even the process itself can change as regulations tighten, customer requirements change and suppliers differ. The ideal automated process station is custom built to exactly match the requirements of a particular process while retaining the software programming capability to respond to production line changes.

User Interface

Modutek’s fully automated wafer fabrication equipment features touch screens with a graphical user interface (GUI). Operators can see the status of the manufacturing process and can start and stop steps if required. Because Modutek designs and programs its software in house, the company can respond to unique requirements at the software level and can add equipment to the GUI if the process changes.

Equipment Interface

Once the operator starts a process and the software program runs, the automated system has to output commands to the equipment on the production line. Modutek uses the SECS/GEM interface standard, which stands for SEMI Equipment Communications Standard/Generic Equipment Model.

SEMI is the Semiconductor Equipment and Materials International organization that developed the standard and defines the communication forms and messaging underlying the interaction of the software and the semiconductor manufacturing equipment. Using a common standard lets Modutek integrate other equipment into its production line designs and easily make changes to the software.

Automated Controllers

Controllers convert the input commands from the operators to corresponding output commands in the correct sequence to control process variables and the motion of the robotics. The sequence of commands is programmed into controllers such as PLC (programmable logic controllers) units that activate a command chain when the right input command is given. PLCs have the advantage that the programmable chains are easily re-programmed to meet changed requirements or equipment changes on the production line.

Because they design their own automation systems, Modutek can integrate higher level controllers such as Omron machine automation controllers or controllers from specific manufacturers such as Allen Bradley. Special controllers are often needed for unique functionality or for integration with existing systems.

Flow Simulation Software

Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software is designed and programmed by the company’s software engineers to calculate chemical dosages and track chemical usage. The software ensures that the process environment for a particular batch is always the same, producing reliable etch rates and consistent throughput. When the process changes, the software can calculate new parameters and can automatically supply the right amounts of chemicals.

Vision Sensing

Fully automated wafer fabrication equipment can benefit from vision sensing with cameras and other optical sensors. The detected images have to be processed to identify the characteristics required by the system. Vision sensing can help with measurement, wafer or die alignment, quality inspection, sorting and mounting. For example, a coating could be inspected for continuity or products could be sorted according to defined properties. Modutek can integrate vision sensing into its fully automated wet process stations and help make sure the required functions work as desired.

Data Logging

The automated system can be programmed to output process variables to data logs that allow tracking chemical use, product quality, output and similar variables. The software sends the required data over Ethernet to create reports that operators and management can use for evaluating production line performance.

Modutek Designs Advanced Software Controls for Custom Applications

In 2020, Modutek is marking their 40th year of operation as a semiconductor equipment manufacturer and wet processing equipment supplier. The company’s success is due to innovation and continuous improvement in equipment and software to benefit their expanding customer base. For any wafer processing equipment needs contact Modutek for a free consultation or quote.

How Fully Automated Wafer Fabrication Equipment Improves Process Control

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As the microscopic structures etched on silicon wafers become more complicated and densely packed, precise process control and the elimination of particle contamination become increasingly important. The accuracy of chemical dosages and the timing of steps have to be consistent and the handling of wafers must be reduced to a minimum. Fully automated wafer fabrication equipment can help ensure that these conditions for the production of high-quality semiconductor components are met.

Software is the Key to Full Automation

Manual and semi-automatic wet processing equipment rely on operators to mix chemicals and transfer wafers. The correct execution of the process steps depends on operator training, the operator following instructions and the instructions being accurate. Errors or inconsistencies in execution can result in defective products, production line down time and low quality output. Throughput is reduced and productivity suffers. The semiconductor manufacturing facility’s overall operations are less efficient and less profitable.

When software runs the wafer fabrication equipment, it eliminates the variability introduced by manual operation and inconsistent documentation. Once a process runs correctly, the software can be saved, and it will always run the same process exactly the same way in the future. Batches are consistent and components work as designed.

The use of software to run fully automated stations can have the following benefits:

  • Exact chemical ratios are ensured and are maintained from batch to batch.
  • The timing of process steps is precise and repeatable.
  • Process variables can easily be optimized by programming small changes in the software.
  • Accurate chemical dosages result in reduced waste and lower chemical use.
  • Chemical neutralization and disposal are reliable and easily documented.
  • Worker safety is enhanced because operators are less exposed to toxic chemicals.

These benefits come from programming automatic controls to manage the cleaning and etching of the silicon wafers. The software calculates how much of each chemical is needed for a particular process step. It controls the adding of the chemicals to the process tank, times the process step, drains the chemicals and neutralizes the waste chemicals. Once the variables in the software are optimized, the software will run the optimized process the same way every time. The results are predictable and consistent.

The Use of Robotics Reduces Contamination

Particle contamination becomes a bigger problem when the structures and conductors on the silicon wafers are small or tightly packed. For the smallest microscopic structures, a single particle may block a conductor, distort a structure or affect diffusion. The result can be an increase in defective products, products with a reduced life span or products that don’t have the desired characteristics.

Manually moving or handling wafers can be a source of particle contamination. Robotic parts are designed with low particle counts in mind and the movement of wafers can be reduced to a minimum. The exact motions are programmed and performed the same way each time.

In fully automated systems, only the robotic arms transport the wafers and no manual handling by operators is required. Once the automated sequence is started, the robotics controlled by the software move the wafers through the process without operator intervention. Fully automated robotic systems reduce particle contamination and improve semiconductor manufacturing facility performance.

Modutek Offers Fully Automated Wafer Fabrication Equipment and Wet Bench Stations

Modutek’s product line includes fully automated wafer fabrication equipment and wet bench stations. The company programs its own SolidWorks Simulation Professional and SolidWorks Flow Simulation software and makes extensive use of robotics to deliver excellent process control and high-quality output. Modutek’s software is developed in house and all wet process stations are assembled in the company’s San Jose facility. This means that Modutek specialists can optimize the automation to deliver the best possible performance and that they can customize the equipment for special applications.

The full range of benefits that Modutek’s fully automated stations include the following:

  • Reduced chemical usage
  • Improved etch rates
  • Higher yields
  • Better throughput
  • Excellent repeatability
  • Can handle both acid and solvent applications
  • Can work with standard wafer carrier sizes and custom sizes up to 30″ x 60″
  • Extensive tracking of process variables
  • Highest output quality

To make sure that the desired performance is maintained and to track all relevant data, the Modutek fully automated stations provide data logging and data access through Ethernet. Customers can record process variables and track key characteristics through an optimization period or during normal processing. These records can be valuable for quality assurance purposes and for demonstrating compliance with environmental regulations.

Modutek Supports the SECS/GEM Semiconductor Industry Protocol

The SECS (SEMI Equipment Communications Standard) and the GEM (Generic Equipment Model) protocol standards specify how automated semiconductor fabrication equipment can communicate with a host computer. Developed by the Semiconductor Equipment and Materials International organization, the standards define interfaces, messaging and communication capabilities. Communication can be via TCP/IP networks or an RS-232 connection. This means the control system of the fully automated wet process station can communicate with hosts that could range from a local computer to a server in the cloud.

Modutek’s fully automated stations support this protocol and can supply a variety of data to the hosts while receiving remote commands to start or stop a process and to choose stored recipes or programs. In an automated fabrication facility, an operator can remotely control their automated stations and can remotely log data and operating parameters. A library of recipes and software programs for specific process steps can be accessed by the automated stations that can carry out fabrication steps with a minimum level of local operator involvement.

Based on their expertise in the field of wet process semiconductor manufacturing and the hands-on experience of its specialists, Modutek can recommend automated semiconductor fabrication equipment and can build systems to meet the specific needs of customer applications. All software and robotics are designed, built and tested at Modutek’s San Jose facility.

The company leverages this capability to offer its customers custom automation solutions. Modutek’s fully automated stations can operate in a simple locally automated cycle where local operators log and verify operations. They can also function as part of an automated fabrication facility controlled remotely with data and operating parameters stored in the cloud.

With more than 35 years of experience, Modutek continues to provide innovative and reliable equipment for semiconductor manufacturing. For a free consultation or quote contact call 866-803-1533 or email Modutek@modutek.com.

 

How Robotics Have Revolutionized Semiconductor Manufacturing

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The automation over the last 25 years of wet bench stations used for semiconductor manufacturing has resulted in more efficient production and an increase in output quality. When the handling and mixing of the chemicals, the handling of the silicon wafers and the timing of the process steps were carried out manually, mistakes could result in defective products. Semiconductor equipment manufacturers have developed automation that has resulted in improved yields and less waste.

Modutek has been on the forefront of developing robotics and process control software that allows fully automatic or semiautomatic processing of silicon wafers. In this way, the entire semiconductor manufacturing process is controlled accurately and reliably. Chemical quantities and process timing are precise, process parameters are reproducible, and material handling is safe. Contamination is reduced with robotic wafer handling. For all these reasons, adding robotics to a wet bench processing line is a cost-effective solution for better facility performance.

Modutek’s Leadership in Wet Bench Robotics

During the company’s history of making wet process equipment, Modutek has focused on the integration of the latest technology in-house and with its own team of specialists. Founded in 1980, Modutek manufactured components such as quartz heated baths, nitride etch baths and rinsing systems. In 2002, Modutek acquired Sysmax Inc. with its advanced automation technology and from there developed its own robotics.

Advances in robotics have allowed Modutek and other semiconductor equipment manufacturers to offer semi-automated and fully automated stations. These wet benches and chemical stations can control the whole semiconductor manufacturing process with no or limited operator intervention. Both fully automated and semi-automated stations produce excellent process uniformity with semi-automated stations and robotics available at a lower cost if full automation is not required.

A key Modutek advantage for this type of equipment is that all process control software and robotics are designed and assembled in-house. The team working in the company’s San Jose, California manufacturing facility carry out all development work for both the SolidWorks Simulation Professional and SolidWorks Flow Simulation software and for the associated robotics. All silicon wafer fabrication equipment is also tested in-house using de-ionized water. As a result, Modutek can offer unparalleled support and customization services.

Advantages and Benefits

The primary motivators for installing fully automated wafer fabrication equipment are to reduce costs and improve output quality. Elimination of human error and increased precision of chemical use means less waste and high-quality products.

Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software can calculate correct dosages and track chemical usage. With tighter environmental regulations, efficient chemical use not only reduces costs directly but also makes environmental compliance easier and less costly. When the composition of chemical baths is tightly controlled, the etch rate or wafer cleaning is predictable and consistent.

Automatic chemical delivery is not only more reliable than a manual procedure – it is also safer. Spills of hazardous or corrosive chemicals are less likely, and employee safety is increased.

Robotic handling of wafers can reduce contamination and deliver cleaner wafers for subsequent processing steps. The reduced size of features in semiconductor microstructures means that a single particle can block etching of a key feature or impact doping in a critical part of the semiconductor component. It is vital to keep contamination of wafers to a minimum, and robotic handling of wafers reduces the sources of particle contamination.

While some semiconductor manufacturing applications can be automated with standard solutions, in many cases the particular needs of a specific customer can require a degree of customization of the robotics and the process control software. Because Modutek does its own robotics and software design, developing custom applications is never a problem. Modutek’s team knows exactly how each part of the automated systems work and how to make the necessary adjustments.

With Modutek’s more than 35 years of experience, the company continues to promote innovation in robotics for semiconductor manufacturing. Robotics has made the wafer fabrication process more efficient, more predictable and safer. With its complete line of automated equipment, Modutek continues to bring these benefits to customers. For a free consultation or quote contact call 866-803-1533 or email Modutek@modutek.com.

Improving Process Control with Fully Automated Wafer Fabrication Equipment

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Improving Process Control with Fully Automated Wafer Fabrication EquipmentAn increasing number of silicon wafer fabrication applications, such as those with large size substrates or densely packed components, require tight process control. Accurate chemical dosage and precise process timing become critical for a high-quality output. Manual and semi-automatic controls depend on operator training and reliable operator execution of instructions, leaving open the possibility of human error and a variation in how process steps are carried out. Fully automated wet benches and chemical stations can improve process control accuracy and help with consistent execution. Software can help calculate process variables and ensure correct dosages. Full automation of the wafer fabrication process with the use of software for process control and robotics for wafer handling can result in better repeatability, reduced waste and improve production line performance.

Advantages of Modutek’s Fully Automated Wafer Fabrication Equipment

Modutek designs, develops and manufactures its wafer fabrication equipment in house to the highest quality standards. The SolidWorks Simulation Professional and SolidWorks Flow Simulation software are developed and supported in house by Modutek’s technical personnel. As a result, Modutek has the expertise to determine what is needed to meet the requirements of a specific customer’s application. It can supply standard wet bench chemical stations or customized equipment to exactly meet the needs of its customers, tailoring its equipment and software to fit any special process control requirements.

To satisfy customer requirements, Modutek can draw upon its complete line of wafer fabrication equipment. Its wet benches and chemical stations can handle both solvent and acid applications, and the equipment can process sizes up to 30 inches by 60 inches. Its software can run simulations, calculate chemical dosage and track chemical use. With its in-house expertise, Modutek can offer unparalleled customer support and comprehensive after sales service.

Benefits of Fully Automated Wafer Processing Equipment

Full automation means that the process is set up and can then run repeatedly in exactly the same way without requiring any operator input. Key factors for improved process control are accurate chemical dosage, precise timing of process steps, exact replication of the process sequence and full neutralization of chemical waste. Because operation of the automated program is transparent and recorded, technical personnel can optimize the individual steps to minimize chemical use and reduce waste. Process times can be adjusted to take into account special features of the application and results can be monitored for potential problems.

When the process automation is fully optimized, consumption of chemicals is reduced. Process output stays constant, the number of defective products is lower and the products are of consistently high quality. There are fewer spills and dosage errors while employee safety is higher. Compliance with environmental regulations in terms of chemical use and discharge is easier because chemical consumption is tracked at all times and the neutralization of discharges is ensured. The process environment is consistent and the optimized process can be repeated reliably.

As a result, wafer fabrication facilities that implement full automation experience lower costs due to reduced chemical use. Yield and throughput increase while output quality remains consistent and high. Production line performance and productivity improve and facility profitability can rise.

How Modutek Can Help

With over 35 years experience in wet bench process and wafer fabrication equipment, Modutek can evaluate a customer’s process needs and offer standard equipment or customized solutions as appropriate. Their engineers can work closely with each customer to identify what is required and ensure that the equipment works as expected. Modutek’s fully automated stations are an excellent choice for reliable and technologically advanced solutions to challenging wafer fabrication requirements. If you need highly reliable wafer fabrication equipment to support your semiconductor manufacturing process call Modutek for a free consultation at 866-803-1533 or email Modutek@modutek.com.

Modutek’s Wet Bench Design Process

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Modutek's Wet Bench Design ProcessIn an effort to meet the highest customer expectations, Modutek has developed a wet bench design process that emphasizes collaboration with customers and dedicates the full resources of the company to identifying and satisfying customer requirements. Key features of the process are an emphasis on quality, an orientation toward partnering with the customer, a project-based account management structure and the use of the latest design tools. With this approach to wet bench equipment design, Modutek intends to ensure that the company meets the highest levels of customer satisfaction.

Design Goals

While meeting and exceeding customer expectations is the overall goal, Modutek emphasizes wet bench process results as well. A high-quality wet bench must be designed for high throughput with a long service life and a low level of downtime. High product quality requires a high level of extremely precise control. Based on these essential features, Modutek starts a conversation with the customer to identify his particular needs.

Partnership Design Program

To begin with the process, Modutek technical personnel gather all the details of their customer’s application. Specifications, data, descriptions and parameters are collected to allow Modutek to understand the customer’s business. The company can then develop the criteria for a successful design together with the customer. The business needs for wet benches, wet process tools, chemical delivery systems or custom semiconductor equipment are explored in detail. At the end of this process the requirements for a successful design are clear.

Design Tools

Once the design requirements have been identified together with the customer, Modutek uses advanced tools to help with design and modeling. Three dimensional design tools ensure precision and the accuracy of the models. Such 3-D designs are created for all wet process and chemical delivery systems, to show the positions of all components and to form the basis for a detailed design review. Once approved, the same material is used to create complete documentation, including post installation maintenance manuals. Using a single set of designs to generate all the documentation ensures that performance is always consistent, even when many units are produced.

Project Management

To execute the production as specified in the designs, Modutek focuses on managing accounts as projects. For each order, the company assigns a dedicated project manager to lead the work. He coordinates with the customer to make sure the design, engineering, manufacturing and integration remain on track. Delivery and installation at the end of the project are handled the same way. The project manager is responsible for ensuring basic technical requirements are met and the customer’s input is respected, leading to a high quality design that meets the customer’s needs.

Factors for a Successful Design Process

Four factors allow Modutek to offer a collaborative design process that gives superior results. First, the company has the experience and broad line of wet bench equipment to respond to a wide variety of customer requirements. Secondly, the company designs and builds all process, etching or cleaning components of its wafer fabrication equipment in house. Thirdly, all automation design is carried out in house, with Modutek engineers designing and writing the software. Lastly, Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation tools help design the system to get the end results specified. All of these factors must be in place for the successful implementation of the type of design process offered by Modutek, and the company works hard to ensure these prerequisites are retained in order to deliver the superior customer-centric service they make possible.

If you need wet bench equipment designed and built for your specific process requirements, contact Modutek at 866-803-1533 or email sales@modutek.com.

The Evolution of Semiconductor Manufacturing and Wafer Fabrication Equipment

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The Evolution of Semiconductor Manufacturing and Wafer Fabrication EquipmentSemiconductor manufacturing equipment such as wafer processing systems and wet bench stations has evolved considerably over the past 15 to 20 years. The processes used have become more efficient by improving repeatability and increasing throughput while processing larger wafers and etching structures with smaller geometries and more detailed component parts. Automation of wafer fabrication equipment to run these processes have become increasingly complex and environmental considerations are now more critical. Chemical stations such as those provided by Modutek Corporation have played an important role in this evolution and continue to be on the forefront of further development and technical innovation.

Increased Productivity

A key element in the evolution of semiconductor manufacturing equipment is increasing productivity due to process improvements. The larger sizes of the substrate and the greater density of the structures to be etched have allowed an increase in yield. Throughput due to better process organization has increased efficiency. These changes have decreased costs and improved quality.

While wafer sizes have increased and the semiconductor structures created by etching have decreased in size, integrating the process elements such as chemical storage, chemical delivery, etching, cleaning and drying has been a major contributor to the evolution of wet bench stations. Modutek and other suppliers of wafer fabrication and processing systems have been able to reduce total manufacturing time and increase throughput while maintaining quality and reducing defects due to mistakes. Often several tasks can be combined and the downtime due to chemical changes can be reduced to a minimum.

Automation

The development of automation systems from Modutek and other suppliers has also played an important role. While open loop controls are still available for processes that need operator input, fully automated systems featuring reliable and accurate closed loop control help improve wet bench performance. Automation can reduce errors and allows semiconductor manufacturing systems to achieve better repeatability. Chemical dosage is always the same, timing is identical for all batches of a particular process and clearly defined process steps allow technicians to pinpoint problem areas and apply further optimization.

Environmental Factors

Environmental regulations have influenced the evolution of semiconductor manufacturing equipment by requiring companies to reduce their environmental footprint. For wet bench processing systems this means ensuring that possible chemical spills are contained and discharges of chemicals are neutralized so they don’t damage the surrounding environment.

Modutek and other companies have seized on these challenges to improve process efficiency in their process equipment by reducing chemical usage and recycling of chemicals when possible. Software allows the calculation of exact dosages and automation carries out the mixing without waste or spillage. Sensors in the chemical baths give feedback on the chemical composition or the neutralization process and ensure that the desired pH value is attained before recycling where appropriate or discharging when needed. Accurate tracking of chemicals in storage and in use lets operators reduce chemical waste to a minimum.

The Evolution Continues

Modutek and other companies specialized in semiconductor manufacturing equipment face continuing challenges to meet the demands of wafer fabrication shops that want to either achieve improvements of current processes or manufacture more densely packed components using new processes. Satisfying customer demand in this area requires that a company provide a wide spectrum of processing equipment that uses the latest technology. For wet bench processing this means offering manual, semi-automated and fully automated etching, cleaning, plating and chemical solvent stations with a wide variety of options that include custom and retrofit systems. If you are looking for reliable wet benches and wafer fabrication equipment built specifically for your business’ needs, call Modutek at 866-803-1533 or email Modutek@Modutek.com to discuss your specific requirements.