How Fully Automated Wafer Fabrication Equipment Improves Process Control

As the microscopic structures etched on silicon wafers become more complicated and densely packed, precise process control and the elimination of particle contamination become increasingly important. The accuracy of chemical dosages and the timing of steps have to be consistent and the handling of wafers must be reduced to a minimum. Fully automated wafer fabrication equipment can help ensure that these conditions for the production of high-quality semiconductor components are met.

Software is the Key to Full Automation

Manual and semi-automatic wet processing equipment rely on operators to mix chemicals and transfer wafers. The correct execution of the process steps depends on operator training, the operator following instructions and the instructions being accurate. Errors or inconsistencies in execution can result in defective products, production line down time and low quality output. Throughput is reduced and productivity suffers. The semiconductor manufacturing facility’s overall operations are less efficient and less profitable.

When software runs the wafer fabrication equipment, it eliminates the variability introduced by manual operation and inconsistent documentation. Once a process runs correctly, the software can be saved, and it will always run the same process exactly the same way in the future. Batches are consistent and components work as designed.

The use of software to run fully automated stations can have the following benefits:

  • Exact chemical ratios are ensured and are maintained from batch to batch.
  • The timing of process steps is precise and repeatable.
  • Process variables can easily be optimized by programming small changes in the software.
  • Accurate chemical dosages result in reduced waste and lower chemical use.
  • Chemical neutralization and disposal are reliable and easily documented.
  • Worker safety is enhanced because operators are less exposed to toxic chemicals.

These benefits come from programming automatic controls to manage the cleaning and etching of the silicon wafers. The software calculates how much of each chemical is needed for a particular process step. It controls the adding of the chemicals to the process tank, times the process step, drains the chemicals and neutralizes the waste chemicals. Once the variables in the software are optimized, the software will run the optimized process the same way every time. The results are predictable and consistent.

The Use of Robotics Reduces Contamination

Particle contamination becomes a bigger problem when the structures and conductors on the silicon wafers are small or tightly packed. For the smallest microscopic structures, a single particle may block a conductor, distort a structure or affect diffusion. The result can be an increase in defective products, products with a reduced life span or products that don’t have the desired characteristics.

Manually moving or handling wafers can be a source of particle contamination. Robotic parts are designed with low particle counts in mind and the movement of wafers can be reduced to a minimum. The exact motions are programmed and performed the same way each time.

In fully automated systems, only the robotic arms transport the wafers and no manual handling by operators is required. Once the automated sequence is started, the robotics controlled by the software move the wafers through the process without operator intervention. Fully automated robotic systems reduce particle contamination and improve semiconductor manufacturing facility performance.

Modutek Offers Fully Automated Wafer Fabrication Equipment and Wet Bench Stations

Modutek’s product line includes fully automated wafer fabrication equipment and wet bench stations. The company programs its own SolidWorks Simulation Professional and SolidWorks Flow Simulation software and makes extensive use of robotics to deliver excellent process control and high-quality output. Modutek’s software is developed in house and all wet process stations are assembled in the company’s San Jose facility. This means that Modutek specialists can optimize the automation to deliver the best possible performance and that they can customize the equipment for special applications.

The full range of benefits that Modutek’s fully automated stations include the following:

  • Reduced chemical usage
  • Improved etch rates
  • Higher yields
  • Better throughput
  • Excellent repeatability
  • Can handle both acid and solvent applications
  • Can work with standard wafer carrier sizes and custom sizes up to 30″ x 60″
  • Extensive tracking of process variables
  • Highest output quality

To make sure that the desired performance is maintained and to track all relevant data, the Modutek fully automated stations provide data logging and data access through Ethernet. Customers can record process variables and track key characteristics through an optimization period or during normal processing. These records can be valuable for quality assurance purposes and for demonstrating compliance with environmental regulations.

Modutek Supports the SECS/GEM Semiconductor Industry Protocol

The SECS (SEMI Equipment Communications Standard) and the GEM (Generic Equipment Model) protocol standards specify how automated semiconductor fabrication equipment can communicate with a host computer. Developed by the Semiconductor Equipment and Materials International organization, the standards define interfaces, messaging and communication capabilities. Communication can be via TCP/IP networks or an RS-232 connection. This means the control system of the fully automated wet process station can communicate with hosts that could range from a local computer to a server in the cloud.

Modutek’s fully automated stations support this protocol and can supply a variety of data to the hosts while receiving remote commands to start or stop a process and to choose stored recipes or programs. In an automated fabrication facility, an operator can remotely control their automated stations and can remotely log data and operating parameters. A library of recipes and software programs for specific process steps can be accessed by the automated stations that can carry out fabrication steps with a minimum level of local operator involvement.

Based on their expertise in the field of wet process semiconductor manufacturing and the hands-on experience of its specialists, Modutek can recommend automated semiconductor fabrication equipment and can build systems to meet the specific needs of customer applications. All software and robotics are designed, built and tested at Modutek’s San Jose facility.

The company leverages this capability to offer its customers custom automation solutions. Modutek’s fully automated stations can operate in a simple locally automated cycle where local operators log and verify operations. They can also function as part of an automated fabrication facility controlled remotely with data and operating parameters stored in the cloud.

With more than 35 years of experience, Modutek continues to provide innovative and reliable equipment for semiconductor manufacturing. For a free consultation or quote contact call 866-803-1533 or email [email protected]

 

How Robotics Have Revolutionized Semiconductor Manufacturing

The automation over the last 25 years of wet bench stations used for semiconductor manufacturing has resulted in more efficient production and an increase in output quality. When the handling and mixing of the chemicals, the handling of the silicon wafers and the timing of the process steps were carried out manually, mistakes could result in defective products. Semiconductor equipment manufacturers have developed automation that has resulted in improved yields and less waste.

Modutek has been on the forefront of developing robotics and process control software that allows fully automatic or semiautomatic processing of silicon wafers. In this way, the entire semiconductor manufacturing process is controlled accurately and reliably. Chemical quantities and process timing are precise, process parameters are reproducible, and material handling is safe. Contamination is reduced with robotic wafer handling. For all these reasons, adding robotics to a wet bench processing line is a cost-effective solution for better facility performance.

Modutek’s Leadership in Wet Bench Robotics

During the company’s history of making wet process equipment, Modutek has focused on the integration of the latest technology in-house and with its own team of specialists. Founded in 1980, Modutek manufactured components such as quartz heated baths, nitride etch baths and rinsing systems. In 2002, Modutek acquired Sysmax Inc. with its advanced automation technology and from there developed its own robotics.

Advances in robotics have allowed Modutek and other semiconductor equipment manufacturers to offer semi-automated and fully automated stations. These wet benches and chemical stations can control the whole semiconductor manufacturing process with no or limited operator intervention. Both fully automated and semi-automated stations produce excellent process uniformity with semi-automated stations and robotics available at a lower cost if full automation is not required.

A key Modutek advantage for this type of equipment is that all process control software and robotics are designed and assembled in-house. The team working in the company’s San Jose, California manufacturing facility carry out all development work for both the SolidWorks Simulation Professional and SolidWorks Flow Simulation software and for the associated robotics. All silicon wafer fabrication equipment is also tested in-house using de-ionized water. As a result, Modutek can offer unparalleled support and customization services.

Advantages and Benefits

The primary motivators for installing fully automated wafer fabrication equipment are to reduce costs and improve output quality. Elimination of human error and increased precision of chemical use means less waste and high-quality products.

Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software can calculate correct dosages and track chemical usage. With tighter environmental regulations, efficient chemical use not only reduces costs directly but also makes environmental compliance easier and less costly. When the composition of chemical baths is tightly controlled, the etch rate or wafer cleaning is predictable and consistent.

Automatic chemical delivery is not only more reliable than a manual procedure – it is also safer. Spills of hazardous or corrosive chemicals are less likely, and employee safety is increased.

Robotic handling of wafers can reduce contamination and deliver cleaner wafers for subsequent processing steps. The reduced size of features in semiconductor microstructures means that a single particle can block etching of a key feature or impact doping in a critical part of the semiconductor component. It is vital to keep contamination of wafers to a minimum, and robotic handling of wafers reduces the sources of particle contamination.

While some semiconductor manufacturing applications can be automated with standard solutions, in many cases the particular needs of a specific customer can require a degree of customization of the robotics and the process control software. Because Modutek does its own robotics and software design, developing custom applications is never a problem. Modutek’s team knows exactly how each part of the automated systems work and how to make the necessary adjustments.

With Modutek’s more than 35 years of experience, the company continues to promote innovation in robotics for semiconductor manufacturing. Robotics has made the wafer fabrication process more efficient, more predictable and safer. With its complete line of automated equipment, Modutek continues to bring these benefits to customers. For a free consultation or quote contact call 866-803-1533 or email [email protected]

Improving Process Control with Fully Automated Wafer Fabrication Equipment

Improving Process Control with Fully Automated Wafer Fabrication EquipmentAn increasing number of silicon wafer fabrication applications, such as those with large size substrates or densely packed components, require tight process control. Accurate chemical dosage and precise process timing become critical for a high-quality output. Manual and semi-automatic controls depend on operator training and reliable operator execution of instructions, leaving open the possibility of human error and a variation in how process steps are carried out. Fully automated wet benches and chemical stations can improve process control accuracy and help with consistent execution. Software can help calculate process variables and ensure correct dosages. Full automation of the wafer fabrication process with the use of software for process control and robotics for wafer handling can result in better repeatability, reduced waste and improve production line performance.

Advantages of Modutek’s Fully Automated Wafer Fabrication Equipment

Modutek designs, develops and manufactures its wafer fabrication equipment in house to the highest quality standards. The SolidWorks Simulation Professional and SolidWorks Flow Simulation software are developed and supported in house by Modutek’s technical personnel. As a result, Modutek has the expertise to determine what is needed to meet the requirements of a specific customer’s application. It can supply standard wet bench chemical stations or customized equipment to exactly meet the needs of its customers, tailoring its equipment and software to fit any special process control requirements.

To satisfy customer requirements, Modutek can draw upon its complete line of wafer fabrication equipment. Its wet benches and chemical stations can handle both solvent and acid applications, and the equipment can process sizes up to 30 inches by 60 inches. Its software can run simulations, calculate chemical dosage and track chemical use. With its in-house expertise, Modutek can offer unparalleled customer support and comprehensive after sales service.

Benefits of Fully Automated Wafer Processing Equipment

Full automation means that the process is set up and can then run repeatedly in exactly the same way without requiring any operator input. Key factors for improved process control are accurate chemical dosage, precise timing of process steps, exact replication of the process sequence and full neutralization of chemical waste. Because operation of the automated program is transparent and recorded, technical personnel can optimize the individual steps to minimize chemical use and reduce waste. Process times can be adjusted to take into account special features of the application and results can be monitored for potential problems.

When the process automation is fully optimized, consumption of chemicals is reduced. Process output stays constant, the number of defective products is lower and the products are of consistently high quality. There are fewer spills and dosage errors while employee safety is higher. Compliance with environmental regulations in terms of chemical use and discharge is easier because chemical consumption is tracked at all times and the neutralization of discharges is ensured. The process environment is consistent and the optimized process can be repeated reliably.

As a result, wafer fabrication facilities that implement full automation experience lower costs due to reduced chemical use. Yield and throughput increase while output quality remains consistent and high. Production line performance and productivity improve and facility profitability can rise.

How Modutek Can Help

With over 35 years experience in wet bench process and wafer fabrication equipment, Modutek can evaluate a customer’s process needs and offer standard equipment or customized solutions as appropriate. Their engineers can work closely with each customer to identify what is required and ensure that the equipment works as expected. Modutek’s fully automated stations are an excellent choice for reliable and technologically advanced solutions to challenging wafer fabrication requirements. If you need highly reliable wafer fabrication equipment to support your semiconductor manufacturing process call Modutek for a free consultation at 866-803-1533 or email [email protected].

Modutek’s Wet Bench Design Process

Modutek's Wet Bench Design ProcessIn an effort to meet the highest customer expectations, Modutek has developed a wet bench design process that emphasizes collaboration with customers and dedicates the full resources of the company to identifying and satisfying customer requirements. Key features of the process are an emphasis on quality, an orientation toward partnering with the customer, a project-based account management structure and the use of the latest design tools. With this approach to wet bench equipment design, Modutek intends to ensure that the company meets the highest levels of customer satisfaction.

Design Goals

While meeting and exceeding customer expectations is the overall goal, Modutek emphasizes wet bench process results as well. A high-quality wet bench must be designed for high throughput with a long service life and a low level of downtime. High product quality requires a high level of extremely precise control. Based on these essential features, Modutek starts a conversation with the customer to identify his particular needs.

Partnership Design Program

To begin with the process, Modutek technical personnel gather all the details of their customer’s application. Specifications, data, descriptions and parameters are collected to allow Modutek to understand the customer’s business. The company can then develop the criteria for a successful design together with the customer. The business needs for wet benches, wet process tools, chemical delivery systems or custom semiconductor equipment are explored in detail. At the end of this process the requirements for a successful design are clear.

Design Tools

Once the design requirements have been identified together with the customer, Modutek uses advanced tools to help with design and modeling. Three dimensional design tools ensure precision and the accuracy of the models. Such 3-D designs are created for all wet process and chemical delivery systems, to show the positions of all components and to form the basis for a detailed design review. Once approved, the same material is used to create complete documentation, including post installation maintenance manuals. Using a single set of designs to generate all the documentation ensures that performance is always consistent, even when many units are produced.

Project Management

To execute the production as specified in the designs, Modutek focuses on managing accounts as projects. For each order, the company assigns a dedicated project manager to lead the work. He coordinates with the customer to make sure the design, engineering, manufacturing and integration remain on track. Delivery and installation at the end of the project are handled the same way. The project manager is responsible for ensuring basic technical requirements are met and the customer’s input is respected, leading to a high quality design that meets the customer’s needs.

Factors for a Successful Design Process

Four factors allow Modutek to offer a collaborative design process that gives superior results. First, the company has the experience and broad line of wet bench equipment to respond to a wide variety of customer requirements. Secondly, the company designs and builds all process, etching or cleaning components of its wafer fabrication equipment in house. Thirdly, all automation design is carried out in house, with Modutek engineers designing and writing the software. Lastly, Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation tools help design the system to get the end results specified. All of these factors must be in place for the successful implementation of the type of design process offered by Modutek, and the company works hard to ensure these prerequisites are retained in order to deliver the superior customer-centric service they make possible.

If you need wet bench equipment designed and built for your specific process requirements, contact Modutek at 866-803-1533 or email [email protected].

The Evolution of Semiconductor Manufacturing and Wafer Fabrication Equipment

The Evolution of Semiconductor Manufacturing and Wafer Fabrication EquipmentSemiconductor manufacturing equipment such as wafer processing systems and wet bench stations has evolved considerably over the past 15 to 20 years. The processes used have become more efficient by improving repeatability and increasing throughput while processing larger wafers and etching structures with smaller geometries and more detailed component parts. Automation of wafer fabrication equipment to run these processes have become increasingly complex and environmental considerations are now more critical. Chemical stations such as those provided by Modutek Corporation have played an important role in this evolution and continue to be on the forefront of further development and technical innovation.

Increased Productivity

A key element in the evolution of semiconductor manufacturing equipment is increasing productivity due to process improvements. The larger sizes of the substrate and the greater density of the structures to be etched have allowed an increase in yield. Throughput due to better process organization has increased efficiency. These changes have decreased costs and improved quality.

While wafer sizes have increased and the semiconductor structures created by etching have decreased in size, integrating the process elements such as chemical storage, chemical delivery, etching, cleaning and drying has been a major contributor to the evolution of wet bench stations. Modutek and other suppliers of wafer fabrication and processing systems have been able to reduce total manufacturing time and increase throughput while maintaining quality and reducing defects due to mistakes. Often several tasks can be combined and the downtime due to chemical changes can be reduced to a minimum.

Automation

The development of automation systems from Modutek and other suppliers has also played an important role. While open loop controls are still available for processes that need operator input, fully automated systems featuring reliable and accurate closed loop control help improve wet bench performance. Automation can reduce errors and allows semiconductor manufacturing systems to achieve better repeatability. Chemical dosage is always the same, timing is identical for all batches of a particular process and clearly defined process steps allow technicians to pinpoint problem areas and apply further optimization.

Environmental Factors

Environmental regulations have influenced the evolution of semiconductor manufacturing equipment by requiring companies to reduce their environmental footprint. For wet bench processing systems this means ensuring that possible chemical spills are contained and discharges of chemicals are neutralized so they don’t damage the surrounding environment.

Modutek and other companies have seized on these challenges to improve process efficiency in their process equipment by reducing chemical usage and recycling of chemicals when possible. Software allows the calculation of exact dosages and automation carries out the mixing without waste or spillage. Sensors in the chemical baths give feedback on the chemical composition or the neutralization process and ensure that the desired pH value is attained before recycling where appropriate or discharging when needed. Accurate tracking of chemicals in storage and in use lets operators reduce chemical waste to a minimum.

The Evolution Continues

Modutek and other companies specialized in semiconductor manufacturing equipment face continuing challenges to meet the demands of wafer fabrication shops that want to either achieve improvements of current processes or manufacture more densely packed components using new processes. Satisfying customer demand in this area requires that a company provide a wide spectrum of processing equipment that uses the latest technology. For wet bench processing this means offering manual, semi-automated and fully automated etching, cleaning, plating and chemical solvent stations with a wide variety of options that include custom and retrofit systems. If you are looking for reliable wet benches and wafer fabrication equipment built specifically for your business’ needs, call Modutek at 866-803-1533 or email [email protected] to discuss your specific requirements.

What to Look For In a Semiconductor Equipment Supplier

What to Look For In a Semiconductor Equipment SupplierWhen purchasing semiconductor manufacturing equipment, it is critical to identify what is important for the application. Establishing objective criteria can help select a supplier that is able to meet the needs of a particular project. Whether the purchaser is an engineer working on a manufacturing process, a facilities manager responsible for a semiconductor fab line, or a researcher looking for lab equipment, identifying the required supplier characteristics can help to ensure that the equipment will perform adequately and deliver the projected results. While the detailed requirements may be different for particular purchases, there are several overall qualities to look for before making the purchase.

  1. The supplier must be an established company with a good track record. It must be able to provide proof that it has the expertise necessary for satisfying the requirements of the project. Reference installations of similar equipment and the names of satisfied customers can establish that a supplier is competent and reputable.
  2. Before considering a company as a supplier, look for the capability to provide a range of equipment for a broad set of applications. A particular project may have special requirements and need some customization. Selecting companies that can meet special needs due to their extensive experience with customized products can help with the purchase of equipment that exactly meets the requirements of the application.
  3. An application will have specific requirements expressed in the technical specifications for the equipment to be purchased. The supplier must understand the requirements and propose equipment that meets all the specifications and is suitable for the intended use. A guarantee before purchase that specific benchmarks will be met confirms that the supplier understands your needs.
  4. It is important to purchase up-to-date technology to avoid having to operate obsolete equipment resulting in inferior performance. The supplier must offer state-of-the-art equipment and be able to demonstrate a continuous development and improvement of existing products.
  5. Maintenance and downtime can significantly increase the cost of equipment beyond the purchase price. Suppliers need to show that the equipment they propose is high quality and they must detail their expectations for maintenance costs and projected downtime based on experience from similar installations.
  6. When equipment breaks down or performance is not as expected, the supplier must have customer support and service capabilities that quickly address any problems on site. Look for details of supplier support and service personnel and evidence that a supplier has the capabilities to provide onsite service and repair.

Modutek scores high on all of the above characteristics as a qualified supplier of semiconductor manufacturing equipment. The company has been providing such equipment to industry, research facilities and university labs for over 30 years. They have a broad range of equipment and extensive experience in customization. Modutek offers the latest technology in high-quality, low maintenance systems and has onsite repair capability. Semiconductor manufacturing equipment from Modutek, including wafer fabrication equipment and wet benches, is an excellent choice for projects in the high tech industry. For more information on Modutek and its products and services, please contact Modutek toll free at 866-803-1533 or email [email protected]

Tips for Selecting the Right Wafer Fabrication Equipment for Your Application

Tips for Selecting the Right Wafer Fabrication Equipment for Your Application

Selecting the right wafer fabrication equipment for your company’s manufacturing requirements is an important decision. Whether you manufacture solar panels, semiconductors, or LED displays, it’s necessary to have a reliable wet bench station constructed by an experienced wet process equipment provider. From the military industry to the medical industry, process and facilities engineers need to consider five factors before selecting an appropriate bench.

High Quality Control Standards and Safety

Due to repeated use, wet bench stations should be both durable and safe. Modutek Corporation ensures equipment meets both conditions by minimal outsourcing of their design and manufacturing process. In addition, all stations come equipped with a chemical fume hood that efficiently expels hazardous chemicals. Testing at their facilities in San Jose, CA confirms functionality and compliance with all current safety standards.

Custom Fabrication Options

Production rates increase when wet bench stations are tailor-made according to your requirements and application. Modutek utilizes PFA, Halar, PVDF and PVC-C welding expertise to construct a station that makes meeting prototype specifications effortless. Modutek specializes in custom designs, providing numerous features for etching, plating, and cleaning. These include:

  • SolidWorks Flow Simulator software
  • Stainless steel construction
  • Teflon plumbing
  • Overhead deck lighting
  • CO2 fire suppression
  • Rear access

Wafer Size

Consider your specific applications and the wafer or substrate sizes a wet bench can handle before making a purchase. Modutek’s selection of wet bench stations process wafer sizes up to 12” and glass solar panels up to 30” x 60”.

A Full Service Vendor    

Don’t settle for off-site service and repair. Wafer fabrication equipment vendors should eliminate the issue of shipping faulty wet benches and related equipment. Fortunately, if your wet bench requires maintenance, Modutek’s specialists come to you. Receive a diagnosis and schedule a convenient repair over the phone.

A Devoted Vendor with a Wide Selection

Whether you need a fully-automated, semi-automated, or manual wet bench, you want a vendor that employs quality resources and expertise to create them all. Modutek offers all three types of stations that are customized according to your requirements.

Fully-Automated Wet Benches

Enjoy a hands-off approach with fully-automated wet process stations. These are available in any size from Modutek. Standard features include Emergency Power Off (EPO) and a one year warranty on all parts.

Semi-Automated Wet Benches 

Etch and clean with precise semi-automatic wet benches. Modutek incorporates servo motor automated robots with touch screen controls in all of their semi-automatic stations. This supplies you with three degrees of flexibility for any processing need. In-house development gives you full turnkey support and the same consistency found in advanced, fully-automated systems.

Manual Wet Benches

Use manual wet benches to reduce the price of using robotics in your clean room applications. Modutek’s standard benches include all the safety features found in automated systems and support both acid and base processes with white polypropylene construction.

Modutek’s Experience

Modutek has built and supplied custom wafer fabrication equipment for 30+ years. Certified specialists work with you from design to final installation and supply future assistance through field service repair. Email [email protected] or call 866-803-1533 for a free quote.

How Modutek’s Wafer Fabrication Equipment Provides Optimum Results

How Modutek's Wafer Fabrication Equipment Provides Optimum ResultsIn 1980, Modutek began manufacturing wet-processing and wafer fabrication equipment for the semi-conductor industry. Working with industry leaders Modutek has stayed focused to their roots by providing high-quality clean room equipment for advanced technical applications. Today, their wafer fabrication equipment and wet bench stations are used in a variety of applications from commercial to academic.

Achieving optimum results with Modutek’s Wet Processing Stations.

Modutek’s wet processing stations provide high quality and optimum results for your manufacturing process. Available in fully-automatic, semi-automatic, and manual benches. All bring unique advantages for your process requirements.

Wet Bench Manual Stations: Offered in a cost effective package, manual stations will support acid and solvent applications. This is offered with various options including a host of safety features without the need for advanced robotics.

Wet Bench Semi-Automatic Stations: Ideal for professional, academic and business applications, Modutek’s Semi-Automatic stations provide a large variety of customizations while remaining competitively priced. Our stations are ideal at continually producing uniform steps for technical work.

Wet Bench Fully-Automatic Stations: Packaged with in-house software, fully automatic robotics and top-of-the line features, Modutek’s fully-automatic stations are the most advanced option for optimal etch rates.

Built exclusively for your needs

Modutek’s wet benches can be customized to handle a host of solvents and applications. In addition to handling all solvent applications, wet benches can be adapted to the following processes:

  • KOH Etching
  • Ozone Etching
  • Ozone Cleaning
  • SC1 & SC2 featuring Megasonic Cleaning
  • Precision Part Cleaning
  • BOE (Buffered Oxide Etching)
  • SPM Cleaning
  • Plating
  • Quartz cleaning
  • Hot phosphoric (Nitride Etching)

Customized with state-of-the-art features

Modutek’s units are use in leading medical, solar, and academic labs. Their popularity is founded from their units’ ability to produce uniform results while exceeding current safety requirements. Additional features may be added to assist in achieving optimal results including:

  • FM4910 (PVC-C) material of construction
  • Rear access design
  • Third party certification for NFPA 70 & 70
  • Semi standard, CE mark and NEC certification available
  • Seismic zone 4 structural certification
  • Fan Filter Units (HEPA)
  • Lift station designed into bench
  • Dedicated drains to carboy with DOT containment
  • Overhead deck lighting
  • Light tower (3-color)
  • Counter balance safety shields

No matter your need or application Modutek’s experienced engineers and technicians will customize, build and test your unit to meet your requirements to provide optimal results. Modutek provides world-class service, set-up and customer support. Their Wet Benches and Wet Process equipment  provide high reliable results for precision processes. Contact them by calling 866-803-1533 or by email from the site.

10 Quick Tips on Selecting Semiconductor Manufacturing Equipment

10 quick tipsFacilities management can be a challenging profession, particularly when it comes to purchasing semiconductor manufacturing equipment. Managers must ensure each piece of machinery is suited to the exact needs of a company, whether one is seeking wafer fabrication equipment or in search of chemical delivery systems.

Such equipment should be procured from companies offering quality customer service, the ability to upgrade, and expansive product lines featuring an array of choices. Thankfully, Modutek has what it takes to provide all of the above to clients. The following list can help those at the helm of vital industry processes choose the items that best suits their needs.

1. Insist on Thorough Instructions With All Equipment

Semiconductor manufacturing equipment requires a great deal of documentation to ensure top-performance. This includes everything from electrical schematics to information pertaining to spare parts.

Because this machinery is so complex, proper documentation is essential to functionality. Following the provided instructions will also be helpful to getting the most out of a piece of equipment. Durable machinery means a longer life-span, which makes purchases that much more cost-effective.

2. Choose a Company That Covers Many Different Applications

There are many differing needs within the field of process engineering. As a result, acquiring equipment from a company that offers a range of options is crucial. Modutek provides solutions related to numerous industry applications, including the following:

  • Ozone Process (standard clean and photo-resist strip)
  • Plating
  • Silicon Etch
  • Precision Cleaning
  • Flat Panel Display
  • Microelectromechanical Systems (MEMS)

3. Take Advantage of the Latest Technology

Modutek makes it a point to keep abreast of the latest equipment advances, which allows a seamless integration of this new technology into their trusted operational model. This includes equipment suited to a variety of industries, from military applications to industrial concerns.

4. Don’t Forget About Safety

When purchasing equipment, it’s essential that all safety measures and operational requirements be clearly defined. The right company will work diligently create a line of safe and secure products that include the appropriate features.

5. Look for a Company Offering Onsite Repair

In those instances where onsite repair is necessary, it’s important to purchase equipment from a company that offers reliable service. This includes sending technicians to specific locations to deal with technical issues if necessary.

6. Get Acquainted With a Company’s Product Line

Knowledge of a company’s product line can help simplify the selection process. For instance, Modutek offers a number of items suited to many different functions/applications. These include:

  • Wet Processing Equipment – Etching systems, vapor dryers, cleaning stations
  • Chemical Stations – Manual and automated wet benches, fume hoods
  • Process Components – Circulators, quartz baths, sub-ambient systems, tanks
  • Handling Equipment – Scrubbers, acid neutralization systems, lift stations, pump carts

7. Ensure That Tech Support Is a Top Priority

A complex piece of equipment may require additional attention, whether that entails troubleshooting, upgrades, or just customer service. It’s also a good idea to purchase products that come with a warranty, which can offer coverage in the event of a significant malfunction.

8. Make Use of Custom Fabrication

Some jobs require highly-specialized machinery. In this case, Modutek’s custom fabrication of equipment can make all the difference. Our staff can create a customized product based on the exact specifications provided. We also offer pieces with additional welding and plumbing capabilities for future additions.

9. Have a Firm Understanding of Equipment Specs

Fully comprehending equipment specifications is vital to making certain that a piece of machinery is right for the job. This is especially relevant when selecting semiconductor manufacturing equipment due to the sheer variety of items, functions and requirements.

Reading up on equipment before purchasing is greatly encouraged in this respect. It also helps to work with experts and engineers well-versed in such products. This will prevent facility managers from purchasing items that fail to meet a company’s requirements.

10.  Rely on the Expertise of an Established Company

Selecting the right equipment from an established company that has expertise and experience is essential when it involves manufacturing tasks integral to process engineering. Modutek has been providing semiconductor manufacturing equipment, wet benches and related wafer fabrication equipment to meet the needs of customers in the high tech industry for over 30 years. For more information on all the products and services Modutek can provide for your company, please contact us toll free at 866-803-1533 or email [email protected].

Choose Modutek’s Quartz Baths When Safety and Reliability Are a Must

Choose Modutek's Quartz Baths When Safety and Reliability Are a MustThe Quartz Baths designed and manufactured by Modutek Corporation are safe and reliable as well as being cost-effective so it can be integrated into your current production system. With over 30 years of experience developing and evolving the bath designs, they are seen in the industry as the quality standard of quartz baths.

Pure quartz is nearly inert and will not react with most other substances. It is for this reason quartz is the perfect choice for semiconductor processes. Not only is it non-reactive, it is also stable at relatively high temperatures. It has a Mohs hardness of 7 and lacks cleavage which enables it to handle most demanding applications.

Modutek offers different Quartz Bath Products to meet your processing needs:

The QFa Series Quartz Baths provide the following benefits:

  • Fast heating that is more even than other manufacturers
  • A nested, 4-sided heating element that heats to 360 degrees Fahrenheit with a serrated overflow barrier
  • A seamless, sloped flange design
  • Minimizes damages which could result from runaway temperatures
  • Dual safety snap switch
  • Improved up-time and reliability because of the longer vessel life
  • Easier laminar flow while it reduces particulate contamination

It can be used with a variety of chemicals including H2SO4, H202, SC1 and other chemicals. It has an operating range of 30 º – 180 ºC. The operating temperature range can be controlled in ± 1 ºC (depends on controller and process). The operating temperature range has a heat-up rate of 2 º C per minute. (This rate will be affected by the size of the system, the fluid being used and other factors.) It can be used for cleaning, etching and stripping and has a ¾” male Flaretek circulating fluid inlet/outlet.

Options include a liquid level sensor, process temperature controller, custom vessel sizes to meet your specifications, quartz diffuser plate and autolid.

The Qa Series Quartz Bath is a constant temperature quartz bath. It has redundant safety devices, seamless, sloped flange design and a bonded, 5-sided circuit heating element. Benefits include improved process yield by faster, more efficient, and even heating. It minimizes the potential damage caused by runaway temperatures. It also increases uptime and reliability because of longer vessel life.

The options available for the Qa Series Quartz Baths include having a magnetic stirrer, a gravity drain, an aspirator (dilution) valve system, remote operation timer switches, quartz bubbler, and process controller.

Both Series Quartz Baths come in a variety of sizes. If you would like to learn more about the Modutek Corporation Quartz Bath models or want a quote, you may reach us at 866-803-1533.