Quick Dump Rinsers

Modutek’s DR SERIES Quick Dump Rinser

WAFER DUMP RINSER:

DR16s Quick Dump RinserThe DR Series quick dump rinser is Modutek’s most efficient process rinsing module. State-of-the-art engineering has eliminated particle entrapment, minimized rinsing time, reduced D.I. water consumption, and shortened dump time.

Quick Dump Rinser Features and Benefits:

Quick Dump top spray

  • 360º overflow weir
  • Contoured vessel design
  • Large machined dump door
  • Dual overhead spray manifolds with low misting nozzles
  • Facilitates laminar flow while minimizing particulate contamination
  • Reduces D.I. water consumption
  • Accelerates dump time and eliminates particle entrapment
  • Eliminates over-spray conditions

System Specifications:

Wafer rinsing action

  • Operating temperature range: Ambient
    (Optional PVDF: 50 – 80º C)
  • One year warranty

Options:

C15sa Rinser Controller

  • Reclaim system
  • Teflon® spray nozzles
  • Teflon® D.I. water manifold
  • Teflon® D.I water valves
  • Process cover modification
  • PVDF process tank
  • Teflon® N2 valves

Facility Requirements:

  • Electrical: 105 – 125 VAC, 1 Ø, 24 amps 50 / 60 Hz (for controller use only)
  • D.I. water: 25 psi (dynamic)
  • N2 50 – 60 psi (max.) controller, 10 – 15 psi N2 bubbler all models

Construction Materials:

  • Rinse tank: Natural polypropylene
  • D.I. manifold tubing and spray nozzles: Natural polypropylene
  • D.I. water valves and N2 valves: Natural polypropylene (fittings: polypropylene)
  • Cover: Clear PVC
  • Dump door: Natural polypropylene (no gaskets or O-ring seals used)

Quick Dump Rinser Model Matrix:

Model

Inside Dimension (ID)
L x W x D (in.)

Deck Cutout
L x W x D (in.)

Deck Area
L x W (in.)

DR16 9.00 x 7.50 x 7.25 12.63 x 11.00 x 17.00 15.00 x 12.25
DR18 12.00 x 11.00 x 10.00 15.50 x 13.50 x 18.00 17.25 x 14.50
DR24 11.50 x 7.50 x 7.25 15.00 x 11.00 x 16.50 17.50 x 12.75
DR25 13.50 x 7.50 x 7.25 17.00 x 11.00 x 17.00 19.50 x 12.75
DR26 16.50 x 7.50 x 7.25 19.50 x 10.25 x 17.00 22.00 x 12.25
DR28 21.50 x 11.50 x 10.00 25.00 x 14.25 x 18.00 26.75 x 15.00
DR112 17.75 x 10.75 x 14.00 21.75 x 14.50 x 22.00 23.00 x 15.25
Model nomenclature: model code, number of cassettes and size of cassettes. eg: DR16 ( 1 each – 6″ cassette )

If you need additional information on any of our Quick Dump Rinser products or want a quote, call us at 866-803-1533.