Modutek

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Automated Wet Bench and Wet Processing Systems

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Fully-Automated Acid/Base Stations For Clean Room Applications

Modutek offers manual, semi-automated as well as fully automated wet process benches and chemical stations that make up an extensive product line of wafer fabrication equipment. In addition, Modutek develops customized solutions to satisfy the requirements of a wide variety of customers. Modutek’s wet bench chemical stations can handle both acid and solvent applications and all standard process sizes, from standard wafer carriers and glass substrates to 30″ x 60″ glass solar panels.
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Automated Wet Bench Systems Designed and Built On-Site

Modutek’s engineers work closely with each customer to design wet bench systems to meet their unique requirements. As components become more densely packed, precise control of process times and chemical dosage become important for improving results. To comply with strict environmental regulations, chemical waste has to be minimized and neutralization of discharges ensured. Full automation means that human error is eliminated, chemical usage is reduced and the process is tightly controlled. With Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software, customers can improve etch rates and throughput while maintaining the highest output quality. The number of mistakes is reduced and the chemical dosage is calculated accurately. Tracking of chemical usage reduces waste and ensures correct usage according to the specific application. The process environment remains consistent at all times and processes are fully repeatable.

Systems Designed and Built to Meet Your Requirements

Modutek’s engineers work closely with each customer to design chemical stations and wafer fabrication equipment that meets the requirements of the each application. Standard equipment modules and software can be customized for any wet bench processing / etching or cleaning application. Modutek’s software engineers design and write all software in house. All robotic equipment is designed, assembled and tested in house at the Modutek’s facility in San Jose, California and all wafer fabrication equipment is tested there using de-ionized water. The result is that Modutek can offer unparalleled end-to-end customer support including final acceptance testing and comprehensive after sales customer service.
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Benefits

Benefits

Features

Features

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Applications

Applications

Benefits

Features

Options

Applications

Modutek’s automated wet bench systems are customized as needed to meet your specific process requirements.