Tag Archives: automated silicon wafer processing

How Software Controls Achieve Best Results in Silicon Wafer Processing

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Depending on the degree of automation, software controls can enhance wafer manufacturing facility performance and achieve improved results. Full automation lets operators take advantage of different operational modes to test new process steps and optimize process variables. The controls can then run the process with precise repeatability and often without operator intervention. The reduction in operator error, monitoring chemical concentration with dosing capability and the increased reliability can result in higher yields and reduced costs with more efficient silicon wafer processing.

Automation controls in wafer manufacturing equipment must be reliable and accurate enough to reproduce exact chemical doses and process times, but flexible enough to permit technicians to make changes when needed. An intuitive operator interface, transparent programming of process steps, and easy adaptation of variables to new requirements help achieve excellent results. Software controls that deliver reliable reproduction of existing processes along with flexible programming for responding to changing requirements can significantly improve facility output.

Software Must Combine Support for Current Operations and Meet Future Needs

Modutek’s software can set process parameters such as chemical dosage, wafer etching, and cleaning times as well as other process parameters. Touch screens with a Graphic User Interface (GUI) allow operators to see process status and intervene if necessary. The displayed process shows the information on the status of the processing equipment. In addition, all set points can be easily modified to reflect your requirements. The software Modutek provides combines operational reliability with the flexibility needed to adapt the programs to new situations or requirements.

Optional Equipment Interface Makes Sure Commands Are Executed Correctly

Modutek offers SECS/GEM protocol or Ethernet access for the data logging interface. This interface allows Modutek to make output changes and integrate new wafer manufacturing equipment while ensuring that software commands are executed properly and accurately. Operators can read displays of process characteristics on the GUI to ensure command execution takes place as expected. All these options are reviewed during the station design layout process to ensure it meets your process and budget requirements.

Peripheral Control Features Can Enhance Software Performance

Data logging can improve performance by providing operators with additional information that allows them to optimize operations. Data loggers can track indicators such as output, process temp, processing times, and all alarm features. All data can form the basis for an evaluation of facility performance and plans for targeted changes to reach clearly defined goals.

Modutek can integrate standard or custom peripheral control features as needed by customers for specific applications. Customers may require certain information to optimize their process or depend on output data for subsequent action. Modutek can analyze such requirements and add the necessary functionality, both in terms of sensors or additional equipment and to ensure the information is processed and presented in a useful format.

Designing and Building Advanced Software Controls to Improve Silicon Wafer Processing

As a leading wet bench manufacturer with extensive experience and expertise in designing and building equipment in-house, Modutek works with customers to ensure their software controls meet their needs. In addition to providing excellent customer support, Modutek can evaluate complex customer applications to propose the best possible solutions. Contact Modutek for a free consultation to discuss your manufacturing equipment needs.

How Customized Equipment Improves Silicon Wafer Processing

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How Customized Equipment Improves Silicon Wafer ProcessingBecause semiconductor manufacturing is made up of a large number of steps, silicon wafer processing often includes unique requirements. Standard equipment may be suitable to some extent, but using custom equipment adapted to the particular process can improve production line performance. Customization of the physical characteristics of the system, the software, the degree of automation and the process components can impact how well the silicon wafer processing equipment works. An experienced supplier of wet processing equipment can advise customers regarding possible customization and follow up with specific equipment suggestions.

Physical Customization of Wet Process Equipment

Semiconductor manufacturing equipment often has to fit into a defined space or is retrofitted into an existing production line. In either case, the dimensions have to be customized to fit the available space. Modutek can build processing stations and tanks with special dimensions to fit and can arrange components for less depth or less length as required. Because Modutek designs and builds all its own equipment, the company is capable of changing the dimensions of its standard products to fit customer requirements.

Customized Software for Special Calculations

The Modutek SolidWorks Flow Simulation and Simulation Professional software allows customers to accurately calculate chemical dosages and to track chemical usage. Custom installations may require special calculations and the software may have to be adapted to calculate and track custom chemical use. Modutek writes all its own software and can therefore customize and adapt the program code. Customers can rely on Modutek to maintain and support the non-standard software and make sure it works the way the customer wants.

Automation With Customized Characteristics

Modutek’s standard wet processing equipment is available in fully automated, semi-automated or manual versions but customers may require some automated functions while other functions remain manual or semi-automatic. Prototypes often rely on manual controls to define basic process parameters. Then the process is optimized in semi-automatic operation while eventually running in fully automatic mode when in full production. Existing product manufacturing may require only full automation but the manufacturing process may need operators to execute some manual functions.

Depending on the customer’s manufacturing needs, Modutek can design automation combining manual and automatic controls as specified by the customer. The automatic process may run until operator intervention is required to execute a command or check a specific condition. Modutek can adapt its systems to meet such special automation needs.

Customized Process Components and Subsystems

Process components and subsystems may include chemical delivery, baths or tanks, wafer handling and wafer drying. Modutek can integrate some of these functions into a single unit or place separate units into a custom arrangement. For example, a chemical delivery station can have local or remote tanks and can be placed behind the processing stations to save space. An IPA vapor dryer can include de-ionized water rinsing and vapor drying in one unit. With the company’s experience as a leading wet bench manufacturer, Modutek can design custom arrangements that carry out the required wet process functions within the parameters set by the customer.

Modutek’s Customizations Improve Process Performance

Modutek has a complete line of standard wet process stations, all designed and built in house. For new customized projects, the custom system is evaluated for special requirements and possible solutions. Modutek then works closely with the customer to ensure that the chosen customizations reflect the special process requirements and will produce the expected results.

When Modutek builds such custom systems, they choose customization over standard systems because the customization will improve overall performance. Improvements can include higher throughput, better output quality and lower costs. Working transparently with the customer, Modutek can demonstrate how its proposals will produce better results and ensure that the finished system meets expectations.