Chemical handling equipment is an important part of a semiconductor manufacturing operation because the aggressive chemicals used in etching and cleaning semiconductor wafers have to be stored, delivered to the process, and disposed of safely. Chemical carts, also referred to as chemical pump carts or chemical collection carts, are a convenient way to remove waste chemicals from process tanks and ready them for disposal. These carts are compact units that can be rolled up to the processing line to pump out processing tank contents. Carts have to be designed for safe pumping and containment of the chemicals and for moving them to a safe location for further treatment.
Chemical Cart Design Features
Modutek’s chemical carts allow operators to quickly remove used chemicals from a process line and let the process continue to the next step with a minimum of delay. The carts are easily rolled up to the process tank that contains the used chemicals and operators can safely transfer even toxic or corrosive chemicals. Modutek’s chemical carts have the following features:
- Compact profile at 36 inches long, 18 inches wide, and 42 inches high
- Made of white polypropylene resistant against acids; also available in stainless steel for solvent applications
- Mounted on swivel casters that can be locked
- Suction wand for emptying process tanks
- Independent discharge tube for transfer of waste chemicals to a neutralization system
- Pneumatic pump, three-eighths inch
- On-cart five-gallon chemical tank with double containment that is Department of Transport approved
- High-level sensor interlocked with pump for additional safety
- All-Teflon piping
Once operators have pumped waste chemicals into the cart tank, the cart can be rolled out to a neutralization area or the waste can be shipped off-site for neutralization and disposal by a specialized company. In either case, the amount of chemicals and the treatment are recorded to ensure compliance with local environmental regulations.
Chemical Handling Equipment Increases Workplace Safety
Chemical handling equipment such as chemical carts allows operators to receive, store, deliver and discharge dangerous chemicals safely. Well-designed chemical handling equipment can reduce waste, deliver accurate dosages to the process and track chemical use. Containment of spills is an important safety and environmental issue that can be addressed by good design practices. Modutek’s extensive experience with wet process technology and the acids used to ensure that the company’s chemical handling systems operate in a completely safe and reliable manner.
Chemical Handling Functions Require Different Types of Equipment
While chemical carts used for the disposal of used chemicals fulfill one particular role, similar units can take on other functions. Chemical delivery systems handle chemical reception, storage, and delivery to the process. They can include remote bulk storage such as in large tote chemical containers that can supply high volumes of chemicals or 55-gallon drums located at the process. Chemical delivery systems can include software for dosage control and software can control the mixing of chemicals as well.
Chemical lift stations can fulfill a role similar to chemical carts but the units are permanently installed. They are sometimes located behind the wet process station they are serving, but Modutek has developed a space-saving design that allows an integration of the lift station in the process line. When chemical waste or waste water enters the lift station tank, the liquids are pumped to a neutralization area for further treatment.
Modutek’s product line of chemical handling equipment allows manufacturers to make their workplaces safer and save money. Chemical carts and other chemical handling equipment can be customized in terms of flow, capacity, and functionality to respond exactly to customer needs. Modutek can leverage its experience in semiconductor manufacturing equipment to help customers choose the right systems and ensure that the chosen systems perform as needed.