Wet Bench Manufacturer | Wet Process Equipment | Modutek

How the Silicon Nitride Wet Etching Process is Improved by Modutek


Silicon nitride is used as a mask when etching silicon wafers during the semiconductor manufacturing process. Before the silicon wafer can be processed further, the silicon nitride has to be removed. A solution of phosphoric acid and de-ionized water etches the silicon nitride while leaving the wafer unaffected. As a result, the silicon nitride is […]