How Quartz Tanks Provide High Reliability and Safety for Wafer Processing
Because quartz is an inert substance that does not react with acids, quartz tanks are ideal containers for silicon wafer processing. The flame-polished quartz used in Modutek’s quartz tanks is impervious to the powerful acids used for processes such as SC1, SPM, and the Piranha process. Quartz tanks are designed to minimize particle contamination and […]