Wet Bench Manufacturer | Wet Process Equipment | Modutek

Changes to the SPM Process Improves Efficiency and Results


The sulfuric acid hydrogen peroxide mixture (SPM) process effectively strips and cleans wafers but suffers from instability due to the decomposition of the hydrogen peroxide. A heated bath improves performance but increases the rate at which hydrogen peroxide changes into water. Periodically spiking the mixture with extra hydrogen peroxide can restore the required concentration but […]