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How the Advanced Ozone Cleaning Process Improves Wafer Yields and Reduces Costs

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Editor’s Note: This article was originally published in January 2017 and has been updated with additional information and reposted in April 2023. Modutek’s advanced ozone cleaning is a highly effective method for removing contaminants from wafers. The process involves using ozone gas, which is a highly reactive oxidant, to break down and remove organic and […]