How Precise Control of the SPM Process Improves Processing Results
While the SPM (Sulfuric acid Peroxide Mix) or Piranha process quickly removes organic contaminants such as photoresist, it is difficult to control. The cleaning action depends on both the temperature and the concentration of the mixture. Both vary if the process is left to carry on without intervention. Better controls can improve cleaning performance, reliability, […]
How Quartz Tanks Provide High Reliability and Safety for Wafer Processing
Because quartz is an inert substance that does not take part in acid chemical reactions, quartz tanks are ideal containers for silicon wafer processing. The flame-polished quartz used in Modutek’s quartz tanks is impervious to the powerful acids used for processes such as SC1, SPM, and the Piranha process. Quartz tanks are designed to minimize […]