Wet Bench Manufacturer | Wet Process Equipment | Modutek

How Advanced Ozone Cleaning Reduces Costs and Improves Wafer Yields


When ozone is used to clean silicon wafers, it reduces the use of aggressive chemicals and it can decrease the wafer particle count. Modutek’s advanced ozone cleaning process can clean more quickly than many chemical-based processes and it delivers other benefits. Ozone is used to remove organic contaminants from wafer surfaces in either the Coldstrip […]