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Equipment Innovations Improve Silicon Nitride Etch Processing

equipment-innovations-improve-silicon-nitride-etch-processing

When silicon nitride wet etching is used to etch masks on silicon wafers, precise control of the etch rate is important. If the etch rate varies, the mask may not be correct and the microscopic structures to be created in the silicon may not have the right shape or depth. In the silicon nitride wet […]