How the SPM Clean Process is Supported in a Wet Bench Process
Editor’s Note: This article was originally published in Oct 2016 and has been updated with additional information and reposted in May 2023. Semiconductor manufacturing involves multiple processing steps which include cleaning silicon wafers. The sulfuric peroxide mix (SPM) cleaning process is widely utilized in semiconductor manufacturing. The process utilizes a mixture of approximately 3 parts […]
New SPM Process Provides 75% Improvement in Chemical Savings
Earlier this year Modutek started implementing its new SPM process with automatic adjustment of the sulfuric peroxide mix concentration and the company now has benchmark results from real process applications. Normally the SPM mixture deteriorates continuously as the hydrogen peroxide turns to water and dilutes the concentration. The SPM mixture has to be completely replaced […]