How Silicon Wafer Cleaning Improves Wafer Yield and Reliability
Summary: Effective silicon wafer cleaning, from established RCA and Piranha methods to advanced megasonic cleaning and the ozone cleaning process, is the foundation for improving yield, reliability, and regulatory compliance in modern fabs. Table of Contents Introduction: The Hidden Threat on Silicon Wafers. The Science of Particle Contamination. Established Cleaning Techniques: Foundations Still in Use. Advanced Cleaning Technologies: Precision Without […]
Silicon Wafer Cleaning: Removing Contaminants to Improve Yields
Editor’s Note: This article was originally published in April 2016 and has been updated with new information and re-posted in February 2024. In the intricate world of semiconductor manufacturing, the cleanliness of silicon wafers is not just a requirement; it’s a critical success factor. Each wafer must undergo many processing steps requiring rigorous cleaning to […]