How the KOH Etching Process is Improved Using Modutek’s Teflon Tanks
Among the different approaches available to foundries that create intricate integrated circuitry on semiconductor chips, etching with potassium hydroxide (KOH) is frequently preferred for the error-free mass-production that it allows. The improvement in precision that the KOH etching process brings to semiconductor fabrication is attributable in large part to the use of deionized water. When […]
Selecting Equipment for the KOH Wafer Etching Process
KOH etching is increasingly used for creating microscopic structures in silicon. The wafer etching process uses a 20 to 30 percent solution of potassium hydroxide to create cavities in the unmasked parts of a silicon wafer. KOH etching is comparatively safe and etching can be tightly controlled through regulation of the bath temperature and doping […]
Tips on Improving Your Silicon Wafer Etching Process
Semiconductor manufacturing facilities and research labs need silicon wafer etching equipment that delivers accurate and repeatable results in a safe and reliable environment. The structures on semiconductor wafers and for micro-electromechanical systems (MEMS) have to be produced to meet tight tolerances and with no contamination by impurities or stray particles. An improved silicon wafer etching […]
Commercial Market Opportunities for MEMS Technology
Micro-electro-mechanical systems (MEMS) is a technology that incorporates the use of microscopic devices ranging in size from several millimeters to less than one micron. They usually have both electrical and mechanical functions and often include parts that can move in response to process conditions, commands from outside the structure or commands from integrated electronics. Typical […]
Using KOH Etching for Batch Processing
Etching baths with varying concentrations of potassium hydroxide (KOH) and controlled temperatures are used in creating microscopic structures on silicon wafers. Modutek can supply equipment such as PFA Teflon tanks, circulation and filtering systems and cassette handling equipment that supports KOH etching. The company designs and builds individualized systems for customers who want to use […]