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Semi-Automated Wet Bench and Wet Processing Systems

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Semi-Automated Acid/Base Stations for Clean Room Applications

Modutek’s Wafer Processing Equipment includes Semi-Automated Stations which are available in a wide verity of configurations. Our semi-automated robots gives you the process uniformity without paying the fully automated price. All robots are servo controlled with 3 degrees of freedom (see attached video). This motion control gives you precise developing, etching or cleaning processes. All robots are built and designed in-house giving you complete turnkey support. Our software engineers design and write the software in house. Our SolidWorks Simulation Professional and SolidWorks Flow Simulation gives you process flow characteristic you require. We do not outsource or subcontract our automation design. With this new line of automation Modutek has expanded the Sysmax Inc. line of automation. In 2002 Modutek acquired Sysmax Inc. and we continue supporting their complete product line of SPS Series, Vac Etch (VES) Series and Transfer Automation System (TAS) series equipment.
Wet-Process-System--4-position-robot

Wafer Processing Equipment -Semi Automated Station Video

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Benefits

Benefits

Features

Features

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Applications

Applications

Benefits

Features

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Applications

If you have any questions about our wafer processing equipment or semi-automated stations or need to discuss your requirements, call us at 866-803-1533.

Modutek’s semi-automated wet processing systems can be customized as needed to meet your specific wet process requirements.