Wet Bench Manufacturer | Wet Process Equipment | Modutek

Safely Controlling the Silicon Nitride Etching Process


Silicon nitride etch removes silicon nitride from silicon wafers during the fabrication process of semiconductor components. A solution of phosphoric acid in water etches silicon nitride rapidly and consistently as long as the temperature of the solution and the concentration of phosphoric acid are kept constant. Maintaining consistent process conditions during the silicon nitride wet […]