Because semiconductor manufacturing relies on a large number of process steps and complicated sequencing, wet benches need to be tailored to meet requirements for a specific application. Before focusing on the process-specific requirements, there are general questions that should be answered. This helps narrow down the selection criteria before making the purchasing decision.
General questions include the level of automation, whether stainless steel solvent stations are required, whether a chemical delivery system is needed and whether any special options for rinsing and drying would be beneficial. Any process steps that require special etching or cleaning equipment can then be considered. Such a structured approach helps with selecting the best wet process station configuration and with integrating special equipment within the wet bench station.
1. Automated Wet Bench Stations
Modutek’s product line of wet benches can be fully automated, semi-automatic or manual. Fully automated stations can run batches without operator intervention and offer excellent repeatability if the same product is manufactured several times. Reliable processing with the use of the Modutek SolidWorks Simulation Professional and SolidWorks Flow Simulation software helps increase throughput and yield.
Semi-automatic stations provide the same increased safety and reduction of human error as fully automated stations without the higher price of full automation. Servo-controlled robots provide high precision and reduce handling. Manual stations are a low-cost option that offers all the process features of the automated stations without the robotics and the cost of automation.
2. Stainless Steel Solvent Stations
Modutek stainless steel stations are an excellent solution for solvent applications. They are available in the manual to fully automated versions and in dry-to-dry configurations. Like the acid stations, they can be used with the Modutek SolidWorks Simulation Professional and SolidWorks Flow Simulation software to calculate chemical doses and the process parameters. Solvent station design can include fume hoods and all stations satisfy fire safety standards.
3. Chemical Delivery Systems
Whether a chemical delivery system is needed depends on the volumes and types of chemicals used in the fabricating process. Chemical delivery systems help avoid spills and make tracking of chemical neutralization and disposal easier. Modutek can custom design the system to exactly meet the needs of an application and a key factor for using a chemical delivery system is when high precision is needed for the chemical dosages.
4. Rinsing and Drying
Once an etching or cleaning process step is complete, the wafers have to be rinsed and dried without introducing any contaminants or particles. Rinsing and drying equipment can fulfill special requirements and improve the process. For example, the Modutek IPA dryer combines rinsing and drying in one station while the quick dump rinser improves process efficiency. Both reduce particle contamination and improve process yields.
5. Special Etching or Cleaning Equipment
Some semiconductor fabrication may require special equipment for specific etching or cleaning process steps. For example, etching of aluminum layers on wafers or the removal of submicron particles can be carried out with wet bench equipment that Modutek has specifically designed for the purpose. Modutek’s Vacuum Metal Etcher automatically etches aluminum layers with great precision and immediately removes hydrogen bubbles as they are generated. In addition Modutek can incorporate the use of Megasonic cleaning equipment to dislodge and remove the tiniest particles from wafers to be processed. This and other kinds of specialized equipment can be integrated into the process line of a wet bench.
Modutek Can Help With the Final Selection
Once customers know the things mentioned above and the requirements of their wet process application, Modutek can suggest appropriate solutions from their complete line of wet process equipment. The company designs and builds all its own equipment and meets standard industry certifications of compliance. Because the work is all done in house, Modutek can customize equipment easily and can offer outstanding customer support and service. All equipment is tested before delivery and includes a comprehensive warranty.