Tag Archives: wet benches

5 Important Things to Know When Buying Wet Bench Stations

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Because semiconductor manufacturing relies on a large number of process steps and complicated sequencing, wet benches need to be tailored to meet requirements for a specific application. Before focusing on the process-specific requirements, there are general questions that should be answered. This helps narrow down the selection criteria before making the purchasing decision.

General questions include the level of automation, whether stainless steel solvent stations are required, whether a chemical delivery system is needed and whether any special options for rinsing and drying would be beneficial. Any process steps that require special etching or cleaning equipment can then be considered. Such a structured approach helps with selecting the best wet process station configuration and with integrating special equipment within the wet bench station.

1. Automated Wet Bench Stations

Modutek’s product line of wet benches can be fully automated, semi-automatic or manual. Fully automated stations can run batches without operator intervention and offer excellent repeatability if the same product is manufactured several times. Reliable processing with the use of the Modutek SolidWorks Simulation Professional and SolidWorks Flow Simulation software helps increase throughput and yield.

Semi-automatic stations provide the same increased safety and reduction of human error as fully automated stations without the higher price of full automation. Servo-controlled robots provide high precision and reduce handling. Manual stations are a low-cost option that offers all the process features of the automated stations without the robotics and the cost of automation.

2. Stainless Steel Solvent Stations

Modutek stainless steel stations are an excellent solution for solvent applications. They are available in the manual to fully automated versions and in dry-to-dry configurations. Like the acid stations, they can be used with the Modutek SolidWorks Simulation Professional and SolidWorks Flow Simulation software to calculate chemical doses and the process parameters. Solvent station design can include fume hoods and all stations satisfy fire safety standards.

3. Chemical Delivery Systems

Whether a chemical delivery system is needed depends on the volumes and types of chemicals used in the fabricating process. Chemical delivery systems help avoid spills and make tracking of chemical neutralization and disposal easier. Modutek can custom design the system to exactly meet the needs of an application and a key factor for using a chemical delivery system is when high precision is needed for the chemical dosages.

4. Rinsing and Drying

Once an etching or cleaning process step is complete, the wafers have to be rinsed and dried without introducing any contaminants or particles. Rinsing and drying equipment can fulfill special requirements and improve the process. For example, the Modutek IPA dryer combines rinsing and drying in one station while the quick dump rinser improves process efficiency. Both reduce particle contamination and improve process yields.

5. Special Etching or Cleaning Equipment

Some semiconductor fabrication may require special equipment for specific etching or cleaning process steps. For example, etching of aluminum layers on wafers or the removal of submicron particles can be carried out with wet bench equipment that Modutek has specifically designed for the purpose. Modutek’s Vacuum Metal Etcher automatically etches aluminum layers with great precision and immediately removes hydrogen bubbles as they are generated. In addition Modutek can incorporate the use of Megasonic cleaning equipment to dislodge and remove the tiniest particles from wafers to be processed. This and other kinds of specialized equipment can be integrated into the process line of a wet bench.

Modutek Can Help With the Final Selection

Once customers know the things mentioned above and the requirements of their wet process application, Modutek can suggest appropriate solutions from their complete line of wet process equipment. The company designs and builds all its own equipment and meets standard industry certifications of compliance. Because the work is all done in house, Modutek can customize equipment easily and can offer outstanding customer support and service. All equipment is tested before delivery and includes a comprehensive warranty.

Why Chemical Lift Station Pumps Are Needed for Wet Bench Stations

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why-chemical-lift-station-pumps-are-needed-for-wet-bench-stations2Once a wet bench process step is completed, the remaining chemicals and waste water have to be drained and transferred to an area for neutralization and disposal. Depending on the physical layout of the semiconductor manufacturing facility, gravity draining may either not be possible at all or may be insufficient in terms of flow and speed. Chemical lift station pumps take over the transfer of chemical solvent in a controlled and optimized way. The removal of chemical solvents and waste liquids is accomplished rapidly and completely, leaving the wet bench station ready for a new process step.

Lift Station Pumps for New Installations

While it may be possible to design new installations without lift station pumps and relying only on gravity drains, changes in the facility, expansions or upgrades may require the retrofitting of pumps. In that case, lift station pumps have to be included in separate stations that are often located behind the wet bench stations. These separate stations take up valuable floor space that could otherwise be dedicated to productive process elements. As a result, incorporating lift station pumps in new wet benches is more desirable.

Modutek can add lift station pumps to their wet bench stations and use them to pump acids, solvents and related chemicals and solutions in their semiconductor manufacturing equipment. The lift stations automatically monitor the lift station tanks. When fluids are detected in the tank via the installed level sensors, the corresponding pump is activated to transfer the liquid from the processing station to the facility’s neutralization area. Incorporating the lift pumps in the processing stations is an efficient and compact solution for new installations.

Adding Lift Stations to Existing Processing Lines

When wet bench processing lines are used with a new process or are upgraded, the gravity drains that were previously adequate may no longer deliver the required flow. Lift stations have to be added to deliver the anticipated performance. Often extensive customization of the lift stations is required to accommodate them in the existing facility.

Modutek can help find solutions to adding chemical lift stations to wet processing lines. The company has a complete line of chemical lift stations for installation outside existing wet processing stations. Modutek engineers evaluate process requirements and plant layout to propose equipment that works best for a particular application.

Modutek’s chemical lift stations have all-plastic fluid paths for resistance to corrosion and feature an automatic constant ON with level sensing governing operation. Standard pumps are vertical centrifugal polypro with other pump options and a double containment option available. The polypro holding tank can be built to the size required and the designs are customized to meet flow requirements. Level sensing is via four float-type level sensors signaling low/low, low, high and high/high. Remote control is available.

Modutek Delivers Customization and Support

Modutek can analyze the requirements of a wet bench installation and propose ideal solutions because the company designs and builds their wet bench equipment in house at their facility in San Jose. With almost 40 years experience in wet bench technology, Modutek has the expertise to find optimum solutions and implement them using their own equipment. Chemical lift stations for existing installations and lift station pumps incorporated into new wet bench stations often require extensive customization. Such customization can include different geometry, size, materials, and control logic to meet unique customer requirements. Modutek can rely on in house experience to adapt its equipment for a specific application. Once delivered and installed, Modutek can provide unparalleled customer support because the company doesn’t use third party suppliers. The Modutek specialists carrying out wet bench and lift station service are backed up by the Modutek personnel who designed and built the equipment.

Reviewed and Approved by Douglas Wagner
President & CEO, Modutek Corporation

 

How Wet Bench Stations Are Tailored for Specific Manufacturing Process Requirements

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The fabrication of semiconductor wafers requires that an elaborate set of chemical etching, stripping and cleaning steps be followed in a precise procedure that can be consistently repeated. The semiconductor manufacturing process requires that the use of hydrofluoric acid and other chemicals which must precisely controlled and monitored. These high-tech processes are critically important to industries that fabricate semiconductors, medical equipment and photovoltaic cells. They require the use of custom-made wet benches designed to assist in the safe and precise control of corrosive chemicals at high temperatures.

Wet bench equipment

Modutek provides a full range of wet bench equipment to address the specialized needs of semiconductor manufacturing facilities and research centers. Wet bench stations can be tailor made according to the specific manufacturing process requirements of a customer.

Citric-nitric passivation wet benches are critical to the passivation of titanium and stainless-steel parts in various industries. Electro-polishing wet bench equipment is deployed in the medical device industry in the manufacture of precision steel, cobalt chrome and titanium components.

Multistage wet process fume hoods with circulation pumps are used in aerospace component manufacture, printed circuit board fabrication, and the semiconductor manufacturing industry. Modutek’s wet bench equipment for the semiconductor industry meets UL2360/FM4910 standards for fire and contamination safety. This enables fabricators to remain compliant with applicable environmental laws.

Titanium anodizing equipment, agitated immersion washers, in-line conveyor washers, spray cabinet washers and other precision equipment are an integral part of the semiconductor industry, as well. Modutek is an industry leader in the design, development and deployment of these and many other kinds of wet bench equipment.

The precision needed in manufacturing equipment

Sulfuric acid-peroxide is a powerful chemical that is critical to the cleaning processes applied to semiconductor wafers. Effective application of this chemical mixture is inherently unstable and requires constant rebalancing. The rebalancing and control is needed to maintain efficiency. The mixture needs to be constantly replenished with hydrogen peroxide at high temperatures, something that can be costly even in simple material costs. Modutek’s high-tech systems not only ensure the correct concentration levels, they also help fabricators contain material costs through the use of an exclusive chemical re-use system to contain material costs. Every part of the process is maintained and monitored by equipment that is software controlled.

The silicon nitride wet etching process is another semiconductor fabrication stage that requires a high level of precision and control. Silicon nitride is used to mask chemical etchings on silicon wafers. Once an etching successfully completes, the masking material requires removal. Typically, a mixture of phosphoric acid and the ionized water is applied. Precise control over the chemical mixture is needed, however, if only to prevent the risk of dangerous heat levels and explosions. Modutek’s wet bench station design addresses this challenge through the use of high-tech safety features and the use of precision software.

Modutek’s in-house design process

From manual to semi-automated and fully automated wet bench stations, Modutek’s products are designed and developed in-house right down to the software. From servo-controlled robots and automated equipment to low-cost manual stations, Modutek’s equipment covers the needs of the industries they serve. With their in house expertise and 35+ years of operation, the company is well equipped to meet and support the requirements of semiconductor manufacturers and research centers. Developing equipment that provides thorough and precise control of the manufacturing process is what sets Modutek apart from other semiconductor equipment manufacturers. Contact Modutek today at 866-803-1533 for a free consultation or quote on wet bench equipment that can be tailor made to support your specific manufacturing requirements.

 

Designing Semiconductor Manufacturing Equipment for Ergonomics and Safety

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Designing Semiconductor Manufacturing Equipment for Ergonomics and SafetySemiconductor manufacturing processes routinely use chemicals and procedures that could result in accidents if the manufacturer did not have a serious commitment to safety. Safety guidelines such as SEMI S2, published by the global industry association for microelectronics manufacturers, help manufacturers implement safe operating protocols. Ergonomic designs for semiconductor manufacturing equipment as described in SEMI S8 help ensure a safe operating environment by reducing operator strain and fatigue.

In semiconductor facilities, fire is one of the most damaging threats and burning plastic releases toxic fumes while contaminating clean areas. The Cleanroom Materials Flammability Test Protocol (Class 4910) or the FM 4910 specification allows manufacturers to specify the use of non-flammable materials for their equipment. A comprehensive approach to safety, including ergonomic design and the reduction of fire hazards is the most effective strategy for reducing accidents in a semiconductor manufacturing environment.

Prioritizing Safety When Purchasing Semiconductor Manufacturing Equipment

Installations that have been in operation for a number of years may no longer satisfy current safety standards or may not meet the safety goals of the owner. The purchase of new equipment is an ideal opportunity to upgrade existing safety features and to ensure that the new equipment is as safe as possible.

Modutek follows the SEMI safety and ergonomics guidelines to design equipment that is easy to use and doesn’t require excessive reach or strength to operate. Typical examples include the Modutek wafer holding tray and a swing-arm operator interface mount. The wafer holding tray on the Modutek wet benches includes a robot arm that moves the tray to the front of the station for optimal loading with a minimum of effort.

The Modutek operator interface is normally out of the way along the side of the station, but that position is hard to see when an operator is monitoring the process. The ergonomic design allows the operator to swing the interface out and angle it for optimal viewing. The swing arm can rotate along three axes so the operator can place it in whatever position is the most convenient. Once in position, the operator can lock it into place securely, so it doesn’t move inadvertently.

Both of these examples demonstrate how Modutek implements ergonomic designs to help operators and technicians carry out their work safely and with a minimum of effort. The result is often higher productivity, more satisfied employees and fewer accidents.

Reducing Fire Hazards on New Equipment

Traditionally clean rooms are fitted with sprinkler systems or other specialized fire protection. An array of sensors detects flames, smoke, chemical vapors or heat and triggers the fire extinguishing system. By this time contamination of the facility is severe and re-establishing clean room manufacturing capability is time-consuming and expensive.

Semiconductor manufacturers and research centers with clean room facilities can reduce the threat of a fire that could disable their production by minimizing the use of flammable materials. Many wet bench processes use corrosive chemicals in tanks and piping made of plastic or other normally flammable synthetic material. Modutek can support efforts to minimize the use of flammable materials by supplying equipment that meets the FM 4910 flammability specifications and reduces the threat of fire.

Increased Safety with New Equipment from Modutek

Modutek has over 35 years experience in designing and manufacturing wet bench stations. The company has a broad range of standard equipment and can customize all aspects of semiconductor manufacturing to meet specific specialized needs.

While Modutek wet benches have a high degree of safety and ergonomic design built in, special customer requests can always be accommodated. Specific safety features or special ergonomic requirements can be added if not already present, and additional precautions against fire and other hazards can be incorporated as needed. Modutek equipment already includes many safety features, but the company has the experience and expertise to meet any additional customer requirements.

Silicon Wafer Etching Processes for Wet Processing Applications

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Silicon Wafer Etching Processes for Wet Processing ApplicationsThe manufacture of semiconductor components such as processors and integrated circuits relies heavily on the etching of silicon wafers with processes such as KOH etching to generate the required structures and connections. Modutek provides wet bench technology that can be used for a wide variety of these etching applications. Managers in charge of semiconductor manufacturing facilities, research centers or universities as well as process engineers working at these organizations can use wet bench equipment from Modutek to meet their silicon wafer etching needs.

KOH Etching

Etching silicon wafers with potassium hydroxide (KOH) is used to create microscopic structures in the silicon. The etch rate is impacted by the temperature of the etching bath, the concentration of KOH and the crystalline structure and impurities in the silicon. KOH etching is an inexpensive and repeatable process that etches rapidly. Modutek offers PFA Teflon tanks of their TFa or TT series for KOH etching applications.

Silicon Nitride Etch

Silicon nitride is used as a masking material in the fabrication of integrated circuits. It can be deposited on the silicon wafer as a thin film and is etched with hot phosphoric acid. The bath temperature is about 180 degrees Celsius, the boiling point of phosphoric acid. The Modutek series Nb nitride etch bath achieves precise temperature control by regulating the de-ionized water to phosphoric acid ratio. Modutek’s silicon nitride etch baths offer excellent repeatability, accurate process control and a high level of safety.

Piranha Etch

The piranha solution is made up of a mixture of sulfuric acid and hydrogen peroxide and is used to clean silicon wafers during the semiconductor manufacturing process. A common ratio used is 3 parts of concentrated sulfuric acid to one part of 30 percent hydrogen peroxide. The solution cleans organic compounds from substrates and oxidizes most metals. It is often used to clean photoresist from silicon wafers. Modutek can evaluate a customer’s silicon wafer cleaning requirements and propose suitable solutions from its extensive line of wet processing equipment.

Metal Etch

The conductors linking the microscopic electronic structures on a silicon wafer must be metallic to conduct the electric signals. Metals such as aluminum, copper and gold are deposited on the silicon wafer and must be etched. Etching metals can be challenging and effective etching depends on selecting the right chemicals and process.

For example, the Modutek vacuum metal etcher is designed for precise wet etching of aluminum layers. The process takes place under vacuum because the chemical reaction creates hydrogen bubbles that interfere with etching precision. In the vacuum, the bubbles are immediately removed by an evacuating pump. Modutek’s wet process equipment can use a variety of etchants to etch different metals.

Gallium Arsenide (GaAs) Etch

Gallium Arsenide is a semiconductor used in the manufacture of integrated circuits and other electric and electronic devices. It is etched with solutions containing hydrogen peroxide, usually in combination with sulfuric, hydrochloric or phosphoric acids. Modutek’s wet process solutions can handle such etching chemicals at lower cost than dry etching.

Modutek Wet Bench Solutions

As a premier provider of semiconductor manufacturing equipment for over 35 years, Modutek can offer wet processing equipment for a wide variety of semiconductor etching and cleaning applications. Modutek’s wet bench technology delivers reliable, repeatable results safely and accurately. The company can help customers in industry and research find solutions to their semiconductor manufacturing needs. For a free quote or consultation on selecting the right equipment for your silicon wafer etching process, contact Modutek at 866-803-1533 or email [email protected].

Tips on Selecting the Right Options for Your Wet Bench Equipment

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Tips on Selecting the Right Options for Your Wet Bench EquipmentModutek wet benches are of white polypropylene construction with 304 stainless steel construction available for solvent applications. The company will build any size and length to meet customer requirements. Safety features include safety interlocks, PVC safety shields, emergency power off mushroom buttons and wiring to NFPA 70 and 79. All models have a Teflon N2 gun, a deionized water hand spray and a continuous flow deionized water manifold.

Fully Automated Stations

Modutek’s fully automated wet bench stations use SolidWorks Simulation Professional and SolidWorks Flow Simulation software to optimize the semiconductor fabrication processes and improve performance. The cost of the units covers the basic station and robotics to handle automated operation. These wet process stations are suitable for customers who need high yields, improved etch rates, better throughput and who want the highest output quality.

In addition to increased performance, fully automated stations eliminate human operator error in calculating the chemical dosage and operating the station. The automated system tracks chemical usage to reduce waste and maintain a consistent process environment. Once programmed, the automated station runs the same software and the process is fully repeatable.

Semi-Automated Stations

The semi-automated stations give customers the advanced features and precision of fully automated stations without having to pay the fully automated price. Stations have a graphic user interface on a PCL touch screen to control servomotors with three degrees of freedom and with encoder feedback. Customers can get process uniformity and accurate handling while saving money.

Modutek semi-automated stations are an excellent option for customers who want the precision of robotic controls without paying for full automation. The semi-automated stations still use the SolidWorks Professional and Flow software packages to ensure customers achieve excellent results while spending less.

Manual Stations

Manual wet benches are a cost effective way for customers to get the safety features and operating characteristics of the Modutek wet process equipment family with competitive pricing and an overall low cost of ownership. The manual stations are an effective way for customers to start using wet process equipment and they can later expand the units to add automation options. The manual equipment is of the same quality as the automated stations and delivers excellent performance without the cost of robotics.

Solvent Stations

For solvent stations Modutek uses a 304 stainless steel construction with fire suppression. Solvent stations are available with the same fully automated, semi-automated or manual options as the other wet processing stations and they share the same advanced features. Solvent stations are for customers who have applications with acetone or IPA or who want to carry out photo resist stripping or EDP etching.

Dry to Dry Wet Process Equipment

Modutek’s Dry to Dry equipment saves time by eliminating transfers and increases throughput and yield. It uses an IPA dryer to avoid having to dry in a separate tool. The same automation options as for other wet processing equipment are available for the Dry to Dry models. The unit is a convenient option for customers who want to simplify their process and increase output.

Custom Options

Because Modutek designs and produces all wet benches and related equipment in house without subcontracting, the company can use in house expertise to develop custom solutions for particular applications that may not fall within the standard option set. Customers can be assured that, no matter what the wet process application, Modutek engineers can propose a custom solution if the broad range of standard options is not suitable. For more information or for a free quote contact Modutek at 866-803-1533 or email [email protected].

Modutek’s Wet Bench Design Process

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Modutek's Wet Bench Design ProcessIn an effort to meet the highest customer expectations, Modutek has developed a wet bench design process that emphasizes collaboration with customers and dedicates the full resources of the company to identifying and satisfying customer requirements. Key features of the process are an emphasis on quality, an orientation toward partnering with the customer, a project-based account management structure and the use of the latest design tools. With this approach to wet bench equipment design, Modutek intends to ensure that the company meets the highest levels of customer satisfaction.

Design Goals

While meeting and exceeding customer expectations is the overall goal, Modutek emphasizes wet bench process results as well. A high-quality wet bench must be designed for high throughput with a long service life and a low level of downtime. High product quality requires a high level of extremely precise control. Based on these essential features, Modutek starts a conversation with the customer to identify his particular needs.

Partnership Design Program

To begin with the process, Modutek technical personnel gather all the details of their customer’s application. Specifications, data, descriptions and parameters are collected to allow Modutek to understand the customer’s business. The company can then develop the criteria for a successful design together with the customer. The business needs for wet benches, wet process tools, chemical delivery systems or custom semiconductor equipment are explored in detail. At the end of this process the requirements for a successful design are clear.

Design Tools

Once the design requirements have been identified together with the customer, Modutek uses advanced tools to help with design and modeling. Three dimensional design tools ensure precision and the accuracy of the models. Such 3-D designs are created for all wet process and chemical delivery systems, to show the positions of all components and to form the basis for a detailed design review. Once approved, the same material is used to create complete documentation, including post installation maintenance manuals. Using a single set of designs to generate all the documentation ensures that performance is always consistent, even when many units are produced.

Project Management

To execute the production as specified in the designs, Modutek focuses on managing accounts as projects. For each order, the company assigns a dedicated project manager to lead the work. He coordinates with the customer to make sure the design, engineering, manufacturing and integration remain on track. Delivery and installation at the end of the project are handled the same way. The project manager is responsible for ensuring basic technical requirements are met and the customer’s input is respected, leading to a high quality design that meets the customer’s needs.

Factors for a Successful Design Process

Four factors allow Modutek to offer a collaborative design process that gives superior results. First, the company has the experience and broad line of wet bench equipment to respond to a wide variety of customer requirements. Secondly, the company designs and builds all process, etching or cleaning components of its wafer fabrication equipment in house. Thirdly, all automation design is carried out in house, with Modutek engineers designing and writing the software. Lastly, Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation tools help design the system to get the end results specified. All of these factors must be in place for the successful implementation of the type of design process offered by Modutek, and the company works hard to ensure these prerequisites are retained in order to deliver the superior customer-centric service they make possible.

If you need wet bench equipment designed and built for your specific process requirements, contact Modutek at 866-803-1533 or email [email protected].

Wet Bench Ergonomics and Safety

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Wet Bench Ergonomics and SafetyImplementing ergonomic engineering principles to reduce operator strain and effort can increase safety and help prevent accidents. Established safety guidelines such as those of the Semiconductor Equipment and Materials International (SEMI), the “SEMI S8-0712 – Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment,” can help manufacturers design their installations accordingly. Such designs make it easy for operators and technicians to reach controls and work with semiconductor wafers. Modutek follows these guidelines and has included specific features in their wet benches and other equipment to allow for ergonomic and safe operation. In addition, when dealing with specific customer requirements or retrofitting existing installations, Modutek can develop customized ergonomic solutions.

Swing Arm Interface Mount

When technicians have to monitor a process or operate tools when troubleshooting they must be able to see the operator interface and input commands safely and ergonomically without stretching or assuming unnatural positions. The normal resting location of the interface is to the side and out of the way. The swing arm allows operators to pull the interface out and over so it is visible and within reach when they are monitoring the process or handling tools.

The swing arm can rotate on three axes and tilt to let operators place it in any desired position. Once the operator pulls the interface into place and orients it in an optimal way, a single push button actuates pneumatic locking by pressing two large bearings together, preventing further movement. With this rigid and low bounce design, the interface can be positioned with one hand, and the design eliminates further movement such as might result from the operation of the touch screen.

Its epoxy powder coating and anodized aluminum finish together with its internal cabling make the swing arm easy to clean with low particulate generation for clean room applications. The fact that one technician can place the arm into a convenient position and lock it with one hand means that a second person to assist with the operations is often not required.

Easy to Load Wafer Holding Devices

The impact of safe and ergonomic design increases greatly when applied to operations that have to be carried out regularly and frequently. When wafer trays and holding devices are designed to make it easy for operators and technicians to use them, even small improvements in ergonomic design can make a big difference in both productivity and safety.

In Modutek wet benches, robot arms move the wafer holding trays to the front of the station to a position optimally located for easy and effortless loading and unloading. Modutek applies such ergonomic design principles to wet bench access for increased safety of operators and technicians working in semiconductor fabrication facilities and research labs.

Ergonomically Designed Upgrades and Customization

When a facility is upgraded or additional equipment is retrofitted, standard ergonomic designs may not meet the needs of the completed installation. Equipment that fully satisfies ergonomic design principles on its own may be difficult to operate when placed in specific configurations. Modutek can apply the company’s experience with ergonomic design to customize installations, ensuring that a customer’s specific ergonomic requirements are met and that the installation as a whole is easy and safe for operators and technicians.

Modutek processing stations are available in a wide variety of configurations and the company works with the customer’s engineering team to custom design the best processing equipment for the particular application. The ergonomic engineering required to ensure easy and safe operation is integrated in these designs and guides the company when customizing their equipment for specialized needs.

If you need help selecting or upgrading wet bench equipment for your application and have specific ergonomic requirements, contact Modutek at 866-803-1533 or email [email protected].

The Evolution of Semiconductor Manufacturing and Wafer Fabrication Equipment

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The Evolution of Semiconductor Manufacturing and Wafer Fabrication EquipmentSemiconductor manufacturing equipment such as wafer processing systems and wet bench stations has evolved considerably over the past 15 to 20 years. The processes used have become more efficient by improving repeatability and increasing throughput while processing larger wafers and etching structures with smaller geometries and more detailed component parts. Automation of wafer fabrication equipment to run these processes have become increasingly complex and environmental considerations are now more critical. Chemical stations such as those provided by Modutek Corporation have played an important role in this evolution and continue to be on the forefront of further development and technical innovation.

Increased Productivity

A key element in the evolution of semiconductor manufacturing equipment is increasing productivity due to process improvements. The larger sizes of the substrate and the greater density of the structures to be etched have allowed an increase in yield. Throughput due to better process organization has increased efficiency. These changes have decreased costs and improved quality.

While wafer sizes have increased and the semiconductor structures created by etching have decreased in size, integrating the process elements such as chemical storage, chemical delivery, etching, cleaning and drying has been a major contributor to the evolution of wet bench stations. Modutek and other suppliers of wafer fabrication and processing systems have been able to reduce total manufacturing time and increase throughput while maintaining quality and reducing defects due to mistakes. Often several tasks can be combined and the downtime due to chemical changes can be reduced to a minimum.

Automation

The development of automation systems from Modutek and other suppliers has also played an important role. While open loop controls are still available for processes that need operator input, fully automated systems featuring reliable and accurate closed loop control help improve wet bench performance. Automation can reduce errors and allows semiconductor manufacturing systems to achieve better repeatability. Chemical dosage is always the same, timing is identical for all batches of a particular process and clearly defined process steps allow technicians to pinpoint problem areas and apply further optimization.

Environmental Factors

Environmental regulations have influenced the evolution of semiconductor manufacturing equipment by requiring companies to reduce their environmental footprint. For wet bench processing systems this means ensuring that possible chemical spills are contained and discharges of chemicals are neutralized so they don’t damage the surrounding environment.

Modutek and other companies have seized on these challenges to improve process efficiency in their process equipment by reducing chemical usage and recycling of chemicals when possible. Software allows the calculation of exact dosages and automation carries out the mixing without waste or spillage. Sensors in the chemical baths give feedback on the chemical composition or the neutralization process and ensure that the desired pH value is attained before recycling where appropriate or discharging when needed. Accurate tracking of chemicals in storage and in use lets operators reduce chemical waste to a minimum.

The Evolution Continues

Modutek and other companies specialized in semiconductor manufacturing equipment face continuing challenges to meet the demands of wafer fabrication shops that want to either achieve improvements of current processes or manufacture more densely packed components using new processes. Satisfying customer demand in this area requires that a company provide a wide spectrum of processing equipment that uses the latest technology. For wet bench processing this means offering manual, semi-automated and fully automated etching, cleaning, plating and chemical solvent stations with a wide variety of options that include custom and retrofit systems. If you are looking for reliable wet benches and wafer fabrication equipment built specifically for your business’ needs, call Modutek at 866-803-1533 or email [email protected] to discuss your specific requirements.

What to Look For In a Semiconductor Equipment Supplier

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What to Look For In a Semiconductor Equipment SupplierWhen purchasing semiconductor manufacturing equipment, it is critical to identify what is important for the application. Establishing objective criteria can help select a supplier that is able to meet the needs of a particular project. Whether the purchaser is an engineer working on a manufacturing process, a facilities manager responsible for a semiconductor fab line, or a researcher looking for lab equipment, identifying the required supplier characteristics can help to ensure that the equipment will perform adequately and deliver the projected results. While the detailed requirements may be different for particular purchases, there are several overall qualities to look for before making the purchase.

  1. The supplier must be an established company with a good track record. It must be able to provide proof that it has the expertise necessary for satisfying the requirements of the project. Reference installations of similar equipment and the names of satisfied customers can establish that a supplier is competent and reputable.
  2. Before considering a company as a supplier, look for the capability to provide a range of equipment for a broad set of applications. A particular project may have special requirements and need some customization. Selecting companies that can meet special needs due to their extensive experience with customized products can help with the purchase of equipment that exactly meets the requirements of the application.
  3. An application will have specific requirements expressed in the technical specifications for the equipment to be purchased. The supplier must understand the requirements and propose equipment that meets all the specifications and is suitable for the intended use. A guarantee before purchase that specific benchmarks will be met confirms that the supplier understands your needs.
  4. It is important to purchase up-to-date technology to avoid having to operate obsolete equipment resulting in inferior performance. The supplier must offer state-of-the-art equipment and be able to demonstrate a continuous development and improvement of existing products.
  5. Maintenance and downtime can significantly increase the cost of equipment beyond the purchase price. Suppliers need to show that the equipment they propose is high quality and they must detail their expectations for maintenance costs and projected downtime based on experience from similar installations.
  6. When equipment breaks down or performance is not as expected, the supplier must have customer support and service capabilities that quickly address any problems on site. Look for details of supplier support and service personnel and evidence that a supplier has the capabilities to provide onsite service and repair.

Modutek scores high on all of the above characteristics as a qualified supplier of semiconductor manufacturing equipment. The company has been providing such equipment to industry, research facilities and university labs for over 30 years. They have a broad range of equipment and extensive experience in customization. Modutek offers the latest technology in high-quality, low maintenance systems and has onsite repair capability. Semiconductor manufacturing equipment from Modutek, including wafer fabrication equipment and wet benches, is an excellent choice for projects in the high tech industry. For more information on Modutek and its products and services, please contact Modutek toll free at 866-803-1533 or email [email protected]