Wet Processing Equipment Components
At Modutek, we’re at the forefront of providing state-of-the-art silicon wet processing equipment designed to serve a spectrum of wet processing applications with unparalleled precision and reliability. Whether you are a process engineer seeking cost efficiency and consistent results, a facilities manager seeking seamless integration and maintenance, or an R&D professional seeking flexibility and customization – our solutions are tailor-made with your specific requirements in mind.
Our wet processing equipment products, which includes Quartz Tanks/Baths, Sub-Ambient Baths, Teflon Tanks, and more, are not only customizable to meet specific manufacturing requirements but also tailored for precise control, enhancing silicon wet etching and cleaning results.
We prioritize safety and environmental responsibilities, ensuring all equipment is compliant with applicable regulations while being capable of accommodating various chemicals and materials that promote optimal performance.
Here is why Modutek is your go-to-choice:
- Customization at its Best: Tailored solutions that align with your unique manufacturing requirements, fostering flexibility and adaptability.
- Precision Control: All equipment is specifically designed to enhance the efficiency and accuracy of silicon wet etching and cleaning processes, creating consistent and repeatable results.
- Safety and Compliance: Committed to providing systems that adhere to regulatory standards, minimizing environmental impact and potential hazards.
- Robust Product Line: Offering a broad array of wet processing equipment products designed to promote optimal performance while preventing substrate contamination.
- Experience and Reliability: Leveraging years of industry expertise to deliver products that are not just advanced but also reliable - minimizing downtime and increasing productivity.

- Unwavering Support: Dedication to customer support that assists you in maintaining an efficient operation with minimum downtime.
At Modutek, we’re at the forefront of providing state-of-the-art silicon wet processing equipment designed to serve a spectrum of wet processing applications with unparalleled precision and reliability. Whether you are a process engineer seeking cost efficiency and consistent results, a facilities manager seeking seamless integration and maintenance, or an R&D professional seeking flexibility and customization – our solutions are tailor-made with your specific requirements in mind.
Our wet processing equipment products, which includes Quartz Tanks/Baths, Sub-Ambient Baths, Teflon Tanks, and more, are not only customizable to meet specific manufacturing requirements but also tailored for precise control, enhancing silicon wet etching and cleaning results.
We prioritize safety and environmental responsibilities, ensuring all equipment is compliant with applicable regulations while being capable of accommodating various chemicals and materials that promote optimal performance.
Here is why Modutek is your go-to-choice:
- Customization at its Best: Tailored solutions that align with your unique manufacturing requirements, fostering flexibility and adaptability.
- Precision Control: All equipment is specifically designed to enhance the efficiency and accuracy of silicon wet etching and cleaning processes, creating consistent and repeatable results.
- Safety and Compliance: Committed to providing systems that adhere to regulatory standards, minimizing environmental impact and potential hazards.

- Robust Product Line: Offering a broad array of wet processing equipment products designed to promote optimal performance while preventing substrate contamination.
- Experience and Reliability: Leveraging years of industry expertise to deliver products that are not just advanced but also reliable - minimizing downtime and increasing productivity.
- Unwavering Support: Dedication to customer support that assists you in maintaining an efficient operation with minimum downtime.

Quartz Tanks/Baths
QFa Series High-Temperature Recirculating Tanks use an evolutionary bath design…

Silicon Nitride Etching Baths
Nb Series Silicon Nitride Etch Baths provide unparalleled process control…
Solvent Baths
SFa Series Stainless Steel Solvent Baths are designed for all solvent applications.
Sub-Ambient Baths for BOE
F SERIES sub-ambient filtered etch baths provide continuous filtration…
FAQ’s about Wet Processing Equipment Components
Yes. Each system can be designed and configured to meet specific process, size, and material compatibility needs. Custom modules, automation options, and control features can be integrated to match exact operational requirements.
Wet processing equipment should comply with applicable semiconductor industry safety standards and environmental regulations, including chemical handling, exhaust control, and hazardous waste management guidelines. Modutek’s equipment is designed to meet industry compliance standards for safety and environmental regulations.
Systems utilize advanced PLC-based controls, precise temperature regulation, and calibrated flow monitoring to ensure consistent and repeatable results while minimizing chemical waste.
Tanks and wet bench components are manufactured from high-purity polypropylene, PVDF, or Teflon, chosen for their chemical resistance to acids, bases, and solvents commonly used in semiconductor processing.
Wet processing equipment and related systems incorporate particle filtration, controlled chemical delivery, and cleanroom-compatible designs to minimize contamination risks throughout the process.
Modutek offers comprehensive service plans that include preventive maintenance, equipment inspections, calibration, and on-site or remote technical support to maximize uptime.
Delivery times depend on the system’s complexity and customization, but all equipment is thoroughly tested before shipment to ensure compliance with specifications, thereby reducing installation and startup times.
Yes. Customer support and training can be provided on-site or remotely, covering operation, safety procedures, and routine maintenance.