Achieving Optimum Particle Removal in a Wet Bench Process
As component packing is tighter and circuit geometries trend towards smaller structures, the reduction of submicron particle contamination during the wet bench process steps becomes more important for output quality. When circuit paths are reduced in size, a single submicron particle can block the path and render the final semiconductor component defective. Even when the […]
How Customized Equipment Improves Silicon Wafer Processing
Because semiconductor manufacturing is made up of a large number of steps, silicon wafer processing often includes unique requirements. Standard equipment may be suitable to some extent, but using custom equipment adapted to the particular process can improve production line performance. Customization of the physical characteristics of the system, the software, the degree of automation […]
How the IPA Vapor Dryer Provides Superior Wafer Processing
After etching and rinsing, an IPA (isopropyl alcohol) vapor dryer can produce dry silicon wafers without watermarks and limited particle adders. In IPA drying, also known as Marangoni drying, the Marangoni effect relies on the low surface tension of IPA compared to water. When IPA vapor is introduced into the drying chamber, a surface tension […]
How Megasonic Cleaning Improves Silicon Wafer Manufacturing Results
Traditional silicon wafer cleaning uses aggressive chemicals to strip wafers and remove particles during semiconductor manufacturing. As semiconductor components such as processors, switches and memory chips become more tightly packed, removing all traces of contamination on the wafer surface becomes important for the production of high quality components and the reduction of component failure rates. […]
How Quartz Tube Stations Work and the Benefits They Provide
Among the many processing steps involved in the manufacture of semiconductor components are high-temperature operations such as diffusion of materials into the silicon wafers. Quartz tubes are an ideal vessel for these process steps because the tubes can withstand the temperatures required and are inert enough to minimize contamination. Typically, the silicon wafers are placed […]
How the IPA Vapor Dryer Improves Wafer Processing Results
Not every advancement in semiconductor fabrication produces results that are usable in industry. To be of value, advancements need to be consistently repeatable when used on an industrial scale. Modutek’s IPA vapor dryer falls into this category, helping semiconductor fabricators improve both yields and processing times. Modutek’s IPA vapor dryers are custom-engineered with in-house experts […]
Improving Wafer Processing with Automated Equipment
Fully and semi-automated wafer processing equipment can help improve wafer output quality by providing consistent chemical processing dosages and timing, however these settings must be first be determined. One way to find optimal process settings is to operate in manual and then in semi-automated mode where settings can easily be adjusted. This is especially true […]
How Megasonic Cleaners Improve Silicon Wafer Manufacturing
The cleaning of silicon wafers is one of the key process steps needed in semiconductor manufacturing. This as become even more critical as micro circuit geometrics continue to shrink on 300 mm silicon wafers. Sub micron particles must be removed from the wafer substrate without damaging the delicate microcircuit structures from previous process steps. Particles […]
Why Particle Removal is Essential in Silicon Wafer Cleaning
During silicon wafer processing, impurities and particles are deposited on wafer surfaces or are left over from previous process steps. Such particles can cause defects in the final semiconductor product. With the reduced size of today’s silicon wafer microstructures, even the tiniest particles can block etching and affect the diffusion processes. The result appears in […]
The Benefits of Using Modutek’s Quartz Tube Cleaning Stations
The semiconductor wafer is the substructure on which the circuitry of every computer chip is laid down. Semiconductor wafers are fabricated in high-tech foundries, and require a precise, ultra-clean operation. One of the most basic requirements of a semiconductor wafer operation: reliably clean quartz tubes. Quartz tube cleaning stations are required equipment at every semiconductor foundry. […]