Modutek

Wet Bench Manufacturer | Wet Process Equipment | Modutek

10 Quick Tips on Selecting Semiconductor Manufacturing Equipment

Making the Right Choice: Comparing Automated and Semi-Automated Wet Bench Systems

Editor’s Note: This article was originally published in August 2014 and has been updated with new information and reposted in October 2023. Facility and process management in the semiconductor industry requires meticulous attention to detail. Here we offer tips that encompass decades of Modutek’s experience, catering to technology professionals, including process engineers, facility managers, and […]

How Quartz Tanks Provide High Reliability and Safety for Wafer Processing

how-quartz-tanks-provide-high-reliability-and-safety-for-wafer-processing

Because quartz is an inert substance that does not take part in acid chemical reactions, quartz tanks are ideal containers for silicon wafer processing. The flame-polished quartz used in Modutek’s quartz tanks is impervious to the powerful acids used for processes such as SC1, SPM, and the Piranha process. Quartz tanks are designed to minimize […]

Easy to Install Wet Processing Equipment for R & D

easy-to-install-wet-processing-equipment-for-rd-300x300

When research labs need to produce semiconductor prototypes or small quantities for testing, it’s often too expensive to place an order with a wet process production line supplier or to purchase complete wet process stations. Modutek has developed innovative tabletop models that are less expensive than full-sized wet process manual stations and take up much […]

Equipment Innovations Improve Silicon Nitride Etch Processing

equipment-innovations-improve-silicon-nitride-etch-processing

When silicon nitride wet etching is used to etch masks on silicon wafers, precise control of the etch rate is important. If the etch rate varies, the mask may not be correct and the microscopic structures to be created in the silicon may not have the right shape or depth. In the silicon nitride wet […]

How Quick Dump Rinsers Improve Wet Processing Results

how-quick-dump-rinsers-improve-wet-processing-results-300x300

While effective and rapid rinsing with a low particle count remains a key benefit of quick dump rinsers, reduced water usage is also becoming more important. Special design measures can lower the amount of water required to rinse the silicon wafers while retaining fast and efficient operation with a low level of particle contamination. Low […]

Innovative Table Top Units that Support Chemical Wet Processing

innovative-table-top-units-that-support-chemical-wet-processing-300x300

Research, proof of concept, or prototyping often require the production of single silicon semiconductors or a small number of functional units. Using a semiconductor manufacturing line for this purpose is expensive and lacks flexibility. Wet process manufacturing can be scaled back to reduce equipment size without losing functionality. Modutek has developed table top units that […]

Improving Silicon Wafer Processing with High Temperature Quartz Tanks

Improving Silicon Wafer Processing with High Temperature Quartz Tanks

Because silicon wafer processing uses acids and bases, the process requires tanks that are impervious to aggressive chemicals. Quartz tanks are stable and do not take part in wet process chemical reactions, even at the high temperatures reached during some of the process steps. Modutek’s quartz tanks use pure flame-polished quartz to reduce impurities that […]

How Teflon Tanks Improve the KOH Etching Process

how-teflon-tanks-improve-the-koh-etching-process-300x300

Etching silicon wafers with potassium hydroxide (KOH) is a popular process for semiconductor manufacturing because it is relatively safe compared to other etching methods and because it features good control of the etch rate. When carried out in Teflon tanks, contamination is reduced and the etch rate can be controlled. A key factor for successful […]

How Specialized Equipment Improves Silicon Wet Etching Processes

how-specialized-equipment-improves-silicon-wet-etching-processes2-300x300

Results from common wet etching processes such as KOH and Piranha etch can be improved with the use of specialized equipment. Depending on the process, key parameters can be controlled especially well and innovative procedures can reduce particle counts. When specialized equipment is used in silicon wet etching processes, wafer output can increase, defects can […]

How Quick Dump Rinsers Improve Silicon Wet Etching Processes

how-quick-dump-rinsers-improve-silicon-wet-etching-processes

When silicon wafers in a wet etching process need rinsing, quick dump rinsers provide fast and effective rinsing of chemicals and particles. In semiconductor fabrication lines such as those of semiconductor manufacturers and research labs, silicon wafers are etched with chemicals. Once the required structures and current paths have been etched into the silicon, the chemicals have […]