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TMAH Etching of Silicon: Process and Equipment Guide
TMAH etching is a wet process that removes silicon with tetramethylammonium hydroxide (TMAH), an organic, metal-ion-free alkaline solution. Run at about 70 to 90°C, it etches {100} planes quickly and…
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How Process Controls Improve Silicon Nitride Wet Etching Results
Enhance Silicon Nitride Etching with Effective Process Controls Editor’s note: This article was originally published in July 2020 and was updated in October 2026 to add information on etch rate…
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How Quick Dump Rinsers Improve Silicon Wet Etching Processes
Editor’s note: This article was originally published in December 2020 and was updated in October 2026 to add information on reduced DI water use from a related 2022 post. When…
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Total Cost of Ownership of a Wet Bench
The total cost of ownership of a wet bench rarely shows up on the quote you get from a vendor. Purchase price is the number procurement budgets against, but it’s…
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Modutek Shows AI SubFAB and Wet Process Equipment at Semicon West
Modutek will exhibit at Semicon West 2026 in San Francisco, where its CEO will present how measurement data from wet process and abatement systems can guide emissions reduction and chemical…
Read More →
Wet vs. Dry Etching: Which Process Fits Your Fab?
Wet vs. dry etching usually comes down to one practical question: does this step need selectivity and low damage or tight directional control? Both methods remove material from a wafer,…
Read More →Latest Posts
Categories
Archives
TMAH Etching of Silicon: Process and Equipment Guide
TMAH etching is a wet process that removes silicon with tetramethylammonium hydroxide (TMAH), an organic, metal-ion-free alkaline solution. Run at about 70 to 90°C, it etches {100} planes quickly and…
Read More →
How Process Controls Improve Silicon Nitride Wet Etching Results
Enhance Silicon Nitride Etching with Effective Process Controls Editor’s note: This article was originally published in July 2020 and was updated in October 2026 to add information on etch rate…
Read More →
How Quick Dump Rinsers Improve Silicon Wet Etching Processes
Editor’s note: This article was originally published in December 2020 and was updated in October 2026 to add information on reduced DI water use from a related 2022 post. When…
Read More →
Total Cost of Ownership of a Wet Bench
The total cost of ownership of a wet bench rarely shows up on the quote you get from a vendor. Purchase price is the number procurement budgets against, but it’s…
Read More →
Modutek Shows AI SubFAB and Wet Process Equipment at Semicon West
Modutek will exhibit at Semicon West 2026 in San Francisco, where its CEO will present how measurement data from wet process and abatement systems can guide emissions reduction and chemical…
Read More →
Wet vs. Dry Etching: Which Process Fits Your Fab?
Wet vs. dry etching usually comes down to one practical question: does this step need selectivity and low damage or tight directional control? Both methods remove material from a wafer,…
Read More →