Modutek will exhibit at Semicon West 2026 in San Francisco, where its CEO will present how measurement data from wet process and abatement systems can guide emissions reduction and chemical waste management in the fab.
Table of Contents
- Modutek Exhibits at Semicon West 2026, Booth #668
- Why Wet Process and Abatement Data Rarely Goes Beyond Compliance Reporting
- From Measurement to Mitigation: Inside the Sustainability Intelligence Session
- Where the Data Comes From: Wet Benches, Chemical Delivery Systems, and Fume Scrubbers
- What Sustainability Intelligence Means for Process, Facilities, and R&D Teams
- What to See at Booth #668: Wet Processing Equipment and Fab Infrastructure Solutions
- Frequently Asked Questions
- Planning Your Visit to Semicon West 2026
1. Modutek Exhibits at Semicon West 2026, Booth #668
Semicon West 2026 runs October 13–15 at the Moscone Center in San Francisco. As one of North America’s most prominent semiconductor industry events, it brings together fab operators, equipment suppliers, and process engineers to review the technologies shaping the next generation of chip manufacturing. This year’s program lists sustainability and smart manufacturing among its focus areas, alongside AI and advanced packaging (SEMICON West).
Modutek will exhibit at Booth #668 in the South Hall. The team will present wet processing equipment, chemical delivery technology, and precision cleaning equipment engineered for production fabs and R&D facilities.
Modutek has been designing and manufacturing wet processing equipment since 1980. Every system is designed and built in-house at the company’s San Jose, California facility, which keeps engineering, assembly, and quality control under one roof. That focus places Modutek among the semiconductor equipment manufacturers specializing in wet processing and the infrastructure that supports it.
Beyond the exhibit floor, Modutek CEO Vineet Shrivastava will present a conference session titled “From Measurement to Mitigation: AI-Enabled Sustainability Intelligence for Wet Process and Abatement.” That session topic runs through the rest of this article: how fabs can get more value from data their equipment already produces.
2. Why Wet Process and Abatement Data Rarely Goes Beyond Compliance Reporting
Every wet process line produces a steady stream of measurements. Bath temperatures, chemical concentrations, dosing volumes, rinse cycles, exhaust flow, and effluent conditions are tracked because both the process and the permit require it.
The problem is what happens next. In many fabs, that data is collected, archived, and summarized for compliance reports. Then it sits.
Shrivastava described the gap directly: “Wet process and abatement systems generate a lot of measurement data that often goes unused beyond compliance reporting.”
Compliance reporting itself carries real weight. In the United States, electronics manufacturers covered by Subpart I of the EPA’s Greenhouse Gas Reporting Program report fluorinated greenhouse gas emissions from their production processes, along with abatement system information where applicable (EPA). The EPA also notes that between 10 and 80 percent of fluorinated greenhouse gases can pass through manufacturing tool chambers unreacted and be released into the air (EPA).
Those figures apply mainly to plasma etch and chamber-cleaning tools rather than wet benches. They do show why sustainability performance across the entire fab is drawing closer attention.
Modutek President Douglas Wagner made the same observation about this year’s show, noting that the Semicon West audience “is paying closer attention to emissions and sustainability performance alongside throughput and yield.”
Much of the data needed to act on emissions and chemical use already exists. Today, it is mostly gathered to prove compliance rather than to improve performance.
3. From Measurement to Mitigation: Inside the Sustainability Intelligence Session
Shrivastava’s session addresses how measurement data from wet process and abatement systems can guide emissions reduction and chemical waste management in the fab.
The title describes a simple progression. Measurement tells a fab what happened. Mitigation changes what happens next. The step between them is analysis that turns stored readings into decisions about chemical use, maintenance timing, and abatement performance.
According to Shrivastava, that same data “can drive real reductions in emissions and chemical use once fabs put predictive tools to work.”
The word predictive matters here. Compliance reporting looks backward over a reporting period. Predictive analysis looks forward, flagging trends before they become excess chemical consumption or unplanned downtime.
For fab teams considering where to start, the session’s framing raises three practical questions:
- What are we already measuring? Wet process and abatement equipment often logs more parameters than anyone regularly reviews.
- Which measurements connect to cost or emissions? Chemical dosing, exhaust treatment, and effluent neutralization tie directly to both.
- Who owns the data? Process, facilities, and EHS teams frequently hold separate pieces of the same picture.
Answering these questions does not require new equipment. It requires a closer look at data the fab already owns.
Shrivastava presents on Wednesday, October 14, from 10:40 to 10:50 a.m. in the Sustainability Pavilion (South Hall, Lower Level, Room 1).
4. Where the Data Comes From: Wet Benches, Chemical Delivery Systems, and Fume Scrubbers
Sustainability data in the wet process area comes from several connected systems. Each one records a different stage of the chemical life cycle, from delivery through use to treatment.
Wet benches and process stations. Wet benches carry out etching, cleaning, and rinsing steps. Their controls track the bath conditions and process timing that determine how much chemistry each run consumes. Modutek’s systems pair high-precision etching and cleaning with chemical monitoring, dosing, and automation technologies for advanced process nodes.
Chemical delivery systems. Chemical delivery systems supply process chemicals to the tools. Delivery records show actual consumption over time, which is the baseline for any chemical reduction effort.
Acid fume scrubbers. Exhaust from wet processing is commonly treated by wet scrubbers, which use a liquid to remove pollutants from a gas stream (Wikipedia). Modutek’s acid fume scrubbers handle this abatement step and include a water recirculation system with pH control and monitoring gauges.
Acid neutralization systems. Spent acids and rinse water must be treated before discharge. An acid neutralization system performs that step. Modutek’s systems use microprocessor-based pH control with digital monitoring, and those records reflect how much treatment the upstream process demands.
Taken together, these systems describe the full path of a chemical through the fab. Taken separately, each one shows only part of it.
[Suggested image: flow diagram showing chemical delivery → wet bench → fume scrubber and acid neutralization, with the data captured at each stage labeled.]
Wagner noted that Modutek’s wet process and abatement equipment “has always been built with those environmental requirements in mind,” and that the session is a chance to show “how that shows up in the equipment itself.”
5. What Sustainability Intelligence Means for Process, Facilities, and R&D Teams
Data-driven sustainability affects each role differently. The value depends on the decisions each team makes every day.
For process engineering teams
- More consistent results: Monitoring bath chemistry and dosing data helps keep processes within tight windows for repeatable output.
- Less chemical waste: Consumption trends reveal where chemistry is replenished or replaced more often than the process needs.
- Trackable records: Consistent measurement data makes troubleshooting and process optimization faster.
For facilities and EHS teams
- A clearer compliance picture: The abatement and neutralization data that supports reporting can also show where emissions and effluent loads can come down.
- Better maintenance planning: Performance trend data supports scheduled maintenance over reactive repairs, which reduces downtime.
- Stronger ROI cases: Measured reductions in chemical use and waste handling give facilities managers concrete numbers for cost-benefit reviews.
For R&D teams
- Precise process control: Measurement data supports the accuracy and repeatability that experiments depend on.
- Better use of research budgets: Tracking chemical consumption across experimental runs helps teams control costs.
- Data that carries forward: Process data gathered in the lab can inform how a process is set up as it scales.
6. What to See at Booth #668: Wet Processing Equipment and Fab Infrastructure Solutions
Booth #668 will feature capabilities that span the wet process and SubFAB infrastructure lifecycle, from the process tool to the systems that deliver chemicals, treat waste, and clean exhaust. Exhibit highlights include:
- Advanced semiconductor wet process equipment: Manual, semi-automated, and fully automated wet benches and process systems for wafer cleaning, etching, stripping, rinsing, drying, and other wet processes.
- SmartFAB AI for intelligent SubFAB operations: An AI-enabled platform that includes SmartCHEM™, SmartSCRUB™, SmartMAINT™, and SmartFLOW™, designed to turn equipment and operational data into intelligence for chemical management, scrubber performance, predictive maintenance, process flow, and sustainability.
- Chemical delivery and distribution systems: Engineered systems for safely storing, delivering, monitoring, and distributing process chemicals throughout the fab.
- Chemical waste handling and treatment: Waste collection systems, lift stations, pH neutralization systems, and effluent treatment plants (ETPs) for safe, efficient management of process waste streams.
- Air and fume abatement: Scrubber systems that support wet process exhaust requirements and supply operational data for facility monitoring and sustainability programs.
- Precision parts cleaning: Configurable cleaning systems for critical components used in semiconductor manufacturing.
Modutek President Douglas Wagner said that combining equipment expertise with chemical infrastructure, waste management, abatement, and intelligent monitoring gives customers “a more integrated approach, from the process tool into the SubFAB.”
[Suggested image: photo of a Modutek wet bench or chemical delivery system at the San Jose facility.]
7. Frequently Asked Questions
Q1. When and where is Semicon West 2026?
October 13–15, 2026, at the Moscone Center in San Francisco, California.
Q2. Where can I find Modutek at the show?
Modutek will exhibit at Booth #668 in the South Hall of the Moscone Center. A locator map is included in section 8.
Q3. What is the Modutek conference session about?
CEO Vineet Shrivastava will present “From Measurement to Mitigation: AI-Enabled Sustainability Intelligence for Wet Process and Abatement.” The session covers how measurement data from wet process and abatement systems can guide emissions reduction and chemical waste management. It takes place Wednesday, October 14, from 10:40 to 10:50 a.m. in the Sustainability Pavilion, South Hall, Lower Level, Room 1.
Q4. What wet process data supports sustainability goals?
Chemical delivery and dosing records, bath monitoring data, exhaust treatment data from fume scrubbers, and effluent data from acid neutralization systems all show how chemicals are used and treated in the fab.
Q5. Does Modutek build equipment for research labs as well as production fabs?
Yes. Modutek designs and builds customized wet processing equipment, precision parts cleaning systems, and wafer fabrication equipment for customers ranging from small research labs to high-volume fabs.
Q6. Where is Modutek equipment built?
Modutek designs and builds its systems in-house at its San Jose, California facility, which supports strict quality control and reliability.
8. Planning Your Visit to Semicon West 2026
If your team is exploring how wet process and abatement data could support emissions and chemical reduction goals, Semicon West offers two ways to explore the topic with Modutek: the conference session and conversations at Booth #668.
Modutek’s booth is in the South Hall, along the 600 aisle. Booth numbers begin with their aisle number, so Booth #668 sits on the 600 aisle, as shown in the map below.
Modutek is located at Booth #668 in the South Hall. Simplified map based on the official Semicon West 2026 floor plan; check the official map for the latest layout.
A little preparation makes those conversations more productive. Consider bringing the chemistries in use, current consumption baselines if available, and the sustainability metrics your fab reports today.
To learn more about Modutek’s wet processing systems and wafer fabrication equipment, visit modutek.com or contact the team at sales@modutek.com or 866-803-1533.
