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Archive: December 2022

Why Pre-Diffusion Cleans Are Essential for Silicon Wafer Processing

Silicon wafers must be completely clean before they go through the diffusion process. If contaminating particles are present on the wafer surfaces during the diffusion process, they will cause defects…

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How Precise Control of the SPM Process Improves Processing Results

While the SPM (Sulfuric acid Peroxide Mix) or Piranha process quickly removes organic contaminants such as photoresist, it is difficult to control. The cleaning action depends on both the temperature…

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