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Archive: August 2022
Equipment Innovations Improve Silicon Nitride Etch Processing
When silicon nitride wet etching is used to etch masks on silicon wafers, precise control of the etch rate is important. If the etch rate varies, the mask may not…
Read More →How Advanced Ozone Cleaning Reduces Costs and Improves Wafer Yields
When ozone is used to clean silicon wafers, it reduces the use of aggressive chemicals and it can decrease the wafer particle count. Modutek’s advanced ozone cleaning process can clean…
Read More →Archive: August 2022
Equipment Innovations Improve Silicon Nitride Etch Processing
When silicon nitride wet etching is used to etch masks on silicon wafers, precise control of the etch rate is important. If the etch rate varies, the mask may not…
Read More →How Advanced Ozone Cleaning Reduces Costs and Improves Wafer Yields
When ozone is used to clean silicon wafers, it reduces the use of aggressive chemicals and it can decrease the wafer particle count. Modutek’s advanced ozone cleaning process can clean…
Read More →- Wet Bench Safety Compliance: What EHS Managers Need to Know
- Acid Neutralization and Effluent Treatment in Semiconductor Fabs
- How to Evaluate a Wet Bench Manufacturer – A Buyer’s Guide
- Precision Megasonic Cleaning for Silicon Carbide Wafers
- How Single Wafer Wet Process Systems Deliver Process Control