Solvents used in semiconductor manufacturing can remove oils and organic contaminants from silicon wafers in preparation for further processing steps. Acetone, isopropyl alcohol (IPA) and ethylene diproxitol (EDP) are solvents commonly used to clean wafers, remove photoresists, and in pattern transfers for the creation of microscopic structures on the wafer. The solvents are inflammable and require special safety measures to reduce the risk of fire and explosion, and they have to be disposed of safely. Stainless steel wet benches incorporating stainless steel processing tanks are an ideal solution for safe processing with solvents.
Safety Requirements for Stainless Steel Wet Bench Stations
The safe operation of stainless-steel solvent stations has to include the following safety features:
- fire suppression
- fire fighting
- protection against exposure
- protection against leaks
- safe disposal
Fire is one of the principal safety hazards because solvents or their vapors can catch fire and explode. Fire suppression measures can include electrical design limiting the potential energy of sparks so they can’t ignite solvents and designing equipment to Class 1, Division 2 specifications.
Firefighting equipment has to be able to extinguish fires, should they occur. For inflammable liquids such as solvents, gas-type fire systems such as those using carbon dioxide are needed. It’s critical to have corresponding safety protocols and procedures to ensure workers are evacuated before triggering the extinguishing gases because the firefighting gas displaces oxygen and could cause suffocation.
Many solvents are harmful when workers are exposed to them over extended periods, either through direct contact or through breathing the vapors. A complete enclosure of the solvent processing tanks along with effective exhausts and leak detection limits the amount of solvent to which workers can be exposed.
Disposal of used solvents has to be carried out safely and according to environmental regulations. The disposal can be on-site if the facility has the corresponding capability, or the waste can be stored in a carboy for pick-up by a specialized disposal company.
Modutek Stainless Steel Wet Bench Stations are Safe and Customizable
Modutek stainless steel stations are made from 304 stainless steel and are available in fully automatic, semi-automatic, or manual versions. Dry to dry and fume hood designs are possible, and the stations feature casters and leg levelers. SolidWorks simulation software calculates the process flow characteristics and all design, assembly, and testing are carried out in-house. The stations can be built to the size and length required and extensive customization is available to exactly match customer requirements.
On the safety side, all stations are wired to the NFPA 70 & 79 standards and designed with fire suppression. Safety interlocks with emergency power off buttons are included. The station tanks have a one-inch lip exhaust and a continuous flow deionized water manifold. PVC safety shields are included and the stations have a nitrogen head case purge with Photohelic pressure interlocks. A Teflon nitrogen gun and deionized water hand spray are also included.
As a leading wet bench manufacturer, Modutek works closely with customers to determine how best to help them meet their objectives. Careful wet bench design can increase productivity and output while reducing costs. Modutek is focused on delivering wet bench equipment such as stainless-steel solvent stations using the best available materials and safe, high-quality designs.
With over 40 years of experience in the manufacture of wet benches and with the ability to carry out all design, assembly, and testing work in the company’s San Jose facility, Modutek is the ideal partner for semiconductor fabrication facilities and research labs. Modutek’s in-house experience allows for easy customization and safe execution of wet process semiconductor manufacturing projects of all kinds. Contact Modutek for a free consultation to discuss your specific solvent processing requirements.
