When semiconductor manufacturing process steps include etching or cleaning with acids, the process station exhaust can be harmful. Acid droplets in the discharge air can create health risks for workers and can corrode equipment. Worker safety standards and more stringent environmental regulations may set limits on the permissible acid droplet concentration.
To address these issues, semiconductor manufacturers need acid fume scrubbers to remove and neutralize acid droplets in the process discharge air. Once the acidic mist is passed through the scrubbers, the output air is clean enough to be discharged into the workspace or outside. Employees can work in a clean and safe work space and the outside environment is not contaminated with acid.
Acid Fume Scrubbers Can Remove up to 99 Percent of Acid Mist
Acid fume scrubbers work by passing the acid mist over a wet bed made up of special, large surface packing material. The scrubber has to be able to handle the flow volume from the process exhaust. Modutek’s scrubbers can remove up to 99% of acid mist and are available in sizes ranging from 500 to 25,000 CFM. This capacity range will satisfy the flow requirements from the smallest to the largest process volumes.
Modutek’s acid fume scrubbers use a high surface area packing material made by industry leader Lantec. The packing material is kept wet with a solution containing acid neutralizing chemicals. As the acid mist passes over the surface of the wet packing material, the acid droplets dissolve in the neutralizing solution. The acid droplets are almost completely removed from the process discharge air, resulting in a clean and non-corrosive air output. The acid in the neutralizing solution is rendered harmless and the solution can be discharged safely.
When Modutek’s high-efficiency acid fume scrubbers are used with the right flow capacity, the corrosive air output from wet process manufacturing stations can made safe for release into the work environment. This is especially important for semiconductor manufacturing operations that rely on a clean, particle-free process space.
Advantages of Modutek’s Fume Scrubbers
Modutek has built its fume scrubbers for a low total cost of ownership combined with design flexibility and ease of operation. The high efficiency resulting from careful design and the use of the Lantec packing material means that a higher percentage of acid fumes are removed and the resulting output air is cleaner and safer. The neutralizing solution from the packing material is recycled, reducing the use of water. A bottom drain makes maintenance easier and the scrubbers have a double containment system for extra safety.
The operator interface gives operators all the information they need for effective operation of the scrubbers. Pressure gauges and flow meters allow operators to get a complete picture of scrubber operation while water level indicators with discharge metering give operators control of neutralizing solution discharge. In addition to wet process station applications, acid fume scrubbers can be used with other chemical handling equipment Modutek offers to provide a safe working environment.
Benefits from Using Modutek Acid Fume Scrubbers
Modutek’s acid fume scrubbers allow facility managers to maintain a clean and safe work environment and neutralize acidic droplets that are discharged from wet process semiconductor manufacturing stations. Even when the use of fume scrubbers is not mandated by worker safety standards or environmental regulations, it often makes sense to install the scrubbers for the many benefits they provide. Benefits can include the following:
- The high acid mist removal rate improves workplace air quality and results in higher employee job satisfaction.
- Ease of use means operators don’t need extensive training and can reliably achieve operational targets.
- Low cost of operation and maintenance allows for a quick return on investment.
- The flexible design and wide range of capacities ensure that there is a system suitable for most applications.
Based on the needs of your facility Modutek can recommend specific acid fume scrubbers from its complete product line to ensure the installed unit meets application requirements.
