Using Modutek’s Teflon Tanks with KOH and TMAH Etching Processes

Using Modutek's Teflon Tanks wModutek’s TFa and TI series PFA Teflon Tanks, along with our other wet bench equipment, fully support KOH etching (Potassium Hydroxide) and TMAH etching (Tetramethylammonium hydroxide)processes.  Our Teflon Tanks are designed together with other wet bench equipment to decrease impurities and unwanted byproducts due to advanced welding techniques with PFA sheet material. Continual adjustments to the Si etching process are not necessary after the initial process has been established.  We construct all our Teflon Tanks and related equipment per individual customer specifications, and we routinely design products that are compatible with a customer’s existing wet bench equipment.

Modutek’s Teflon Tanks have an operating temperature range from 30 – 100º C, with a process temperature control of ± 0.5º C and a heat-up rate from 2-3º C per minute (depending on the size of system).  Our modular design allows for new installation or upgrades into any wet etching station configuration.

Teflon® tank configurations that support KOH and TMAH Etching:

  1. Temperature Controlled Re-circulating Baths (TFa Series)
  2. Temperature Controlled Static Baths (TI Series)

Teflon Tank design features:

  • Manual cover with overlapping seal
  • Minimizes water lost
  • No concentration deficiency over long etch time

Heat source options include: 

  1. Teflon® inline heating
  2. Immersion heating in overflow weir for TFa Series and main tank for TI Series

Static KOH etching bath with condensing coilsCustom Teflon® Tanks and Additional Options:

  • Custom size Teflon® tanks can also be built to match any size (no limitations)
  • Bottom drain features
  • Magnetic stirrer for agitation (TI and TT series)
  • Water condensing refluxor system available on all baths
  • Auto lid feature
  • DI water or IPA spiking system available

Benefits of Teflon Tanks:

  • Modular design
  • Two available heat sources
  • All Teflon® fluid path
  • Process temperature control of ± 0.5º C
  • Process etch uniformity wafer to wafer <2%
  • In house heater maintenance and repair
  • 360 degree overflow filtration
  • Uniform heating throughout the bath

KOH etching tank with condensing coils and semi auto robotModutek provides world-class service, installation and support for all our Teflon Tanks and related wet bench equipment. We provide quality products and services that focus on reliability, precision, throughput, usability and up-time. For more information contact us by calling 866-803-1533 or by email from our site.