Solar cell manufacturing facilities and research labs use wet processing equipment to etch and clean solar cell silicon wafers. Efficient removal of wafer saw damage, adding of texture, chemical polishing and cleaning of the wafers with reliable, safe wet processing systems is a key factor for increased facility productivity and high quality output. Modutek offers the latest wet bench and ozone cleaning technology to meet customer requirements either with standard systems or customized solutions.
Silicon Wafer Saw Damage Removal
Solar cell silicon wafers are cut from silicon bricks with wire saws, leaving a damaged surface with irregular crystal structure and a damaged crystal lattice. The wafers are placed in an etching bath that removes a thin layer of damaged crystal and leaves a smooth and uniform surface. Modutek wet processing equipment delivers high throughput with accurate controls and consistent results for this process.
Silicon Wafer Texturing
Silicon wafers used for solar cells absorb more light and convert light to electricity more efficiently when their front surface is etched with a microscopic texture. The texture reduces reflection of light from the solar cell surface and promotes internal reflection. For monocrystaline silicon, an etching bath removes small pyramid shapes from the surface of the silicon, leaving an even, consistent texture. For multi crystal silicon, the surface can be etched the same way, but the result is uneven and less effective due to the different orientations of the crystals. Alternative solutions with ion-etching and masks are available.
Chemical Polishing
After the front of the wafer is textured, the rear side remains comparatively rough. Such roughness can reduce the life span of the solar cell and impacts performance. By polishing the rear side of the cell and the edges in an etching bath, internal light reflection is improved and a higher efficiency cell can be manufactured.
Ozone Pre-Cleaning
The cutting of silicon wafers with a wire saw uses a slurry applied to the wires. The cut wafers are contaminated with the slurry and have to be cleaned before they can be etched, textured and polished. The Modutek Ozone Cleaning Process uses ozone dissolved in a mild acid bath to deliver high-performance cleaning at low cost.
The Modutek Ozone Cleaning Process reduces the use of expensive and environmentally harmful chemicals while improving throughput and producing wafer output with fewer defects. The equipment itself is less expensive than other cleaning solutions and there are lower costs due to reduced use of water and for disposal of waste.
Modutek Wet Processing Systems for the Solar Industry
Modutek has been providing wet processing equipment for semiconductor manufacturing for over 35 years and has the experience to examine customer applications and recommend the best solutions. For solar cell manufacturers, Modutek can offer the right equipment for cleaning, etching, polishing and texturing the silicon wafers and can make recommendations on the processes to be used.
In some cases it may make sense to combine saw damage removal with texturing or with polishing and different chemical baths may be appropriate for different customer needs. Modutek can advise customers which wet processing systems they need and can customize equipment if required. Modutek supplies wet processing systems and related equipment to solar cell manufacturers in the United States as well as around the world. Contact Modutek for a free quote or consultation to discuss which equipment to use for your application requirements.